集成微力检测与反馈的双晶片微夹持器

兵工学报 ›› 2009, Vol. 30 ›› Issue (9): 1242-1247.

集成微力检测与反馈的双晶片微夹持器

叶鑫，张之敬，孙媛，王强

北京理工大学机械与车辆学院，北京100081

收稿日期:2008-06-02 上线日期:2014-12-25
通讯作者: 叶鑫 E-mail:yexin@bit．edu．cn
作者简介:叶鑫（1982-），女，讲师，博士，
基金资助:
总装备部预先研究项目( 51318020309)；北京理工大学2008年度“优秀青年教师资助计划”项目

A Bimorph Piezoelectric Ceramic Microgripper Integrating Micro force Detecting and Feedback

YE Xin, ZHANG Zhi-jing, SUN Yuan,WANG Qiang

School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China

Received:2008-06-02 Online:2014-12-25
Contact: YE Xin E-mail:yexin@bit．edu．cn

摘要/Abstract

摘要： 微夹持器广泛应用于微装配、生物、医疗等领域。目前复杂武器装备生产中的微小型结构件及系统的夹持和装配还是依靠现场工作人员的经验决定，因此，有必要对微夹持器进行研究。以双晶片微夹持器为例，针对复杂三维微小型结构件及系统，提出了集成微力检测与反馈的组合式微夹持技术并研制了相应的微夹持器；阐述了微力检测与反馈的基本原理，搭建了面向双晶片压电陶瓷微夹持器的基于半导体应变片的微力检测与反馈电路。通过夹持实验实现了微力信号的测量与检测，为夹持、移动和装配过程中的微力测量提供了条件。

关键词: 仪器仪表技术 , 微夹持 , 微力检测 , 微小型结构件 , 双晶片压电陶瓷

Abstract: The microgripper is widely used in microassembly, biology and medical applications. Con?sidering that the gripping and assembling micro structural parts and systems in complex weapon pro?duction depends on the experience of staff, it is necessary to discuss the issue in detail. Taking a bi- morph piezoelectric ceramic microgripper for instance, aiming at complex 3D micro structure and sys?tem, a bimorph piezoelectric ceramic microgripping technology integrating micro-force detecting and feedback was proposed，and corresponding microgripper was developed; the theory of micro-force de?tecting and feedback was discussed m detail, and the micro-force detecting and feedback circuit based on semiconductor-strain was established. The function was realized by experiments, which provides the conditions for micro-force measurement during the clamping, displacing and assembling process.

Key words: technology of instrument and meter , microgripping , micro-force sensing , micro structural part , two-chip piezoelectric ceramic

中图分类号:

TH115

叶鑫，张之敬，孙媛，王强. 集成微力检测与反馈的双晶片微夹持器[J]. 兵工学报, 2009, 30(9): 1242-1247.

YE Xin, ZHANG Zhi-jing, SUN Yuan,WANG Qiang. A Bimorph Piezoelectric Ceramic Microgripper Integrating Micro force Detecting and Feedback[J]. Acta Armamentarii, 2009, 30(9): 1242-1247.

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