基于复色共焦的透明材料厚度测量数据处理方法研究

doi:10.3969/j.issn.1000-1093.2016.10.025

兵工学报 ›› 2016, Vol. 37 ›› Issue (10): 1964-1968.doi: 10.3969/j.issn.1000-1093.2016.10.025

• 研究简报 • 上一篇

基于复色共焦的透明材料厚度测量数据处理方法研究

安喆，徐熙平，乔杨，张宁，吕耀文

（长春理工大学光电工程学院，吉林长春 130022）

收稿日期:2015-11-12 修回日期:2015-11-12 上线日期:2016-12-08
通讯作者: 安喆 E-mail:2955100200@qq.com
作者简介:安喆（1992—），女，博士研究生
基金资助:
吉林省科技发展计划项目（20120357）

Research on Approaches to Processing of Measured Thickness Data of Transparent Material Based on Polychromatic ConfocalTechnology

AN Zhe, XU Xi-ping, QIAO Yang, ZHANG Ning, LYU Yao-wen

(School of Electro-Optic Engineering，Changchun University of Science and Technology，Changchun 130022，Jilin，China)

Received:2015-11-12 Revised:2015-11-12 Online:2016-12-08
Contact: AN Zhe E-mail:2955100200@qq.com

摘要/Abstract

摘要： 为了解决精密光学透镜制造、玻璃容器生产等透明材料相关行业对厚度检测的需求，采用复色共焦法对透明材料厚度进行检测。介绍了共焦系统测量原理，提出了测量结构方案，构建了测量实验装置，并对实验装置进行了标定。利用线性回归法对实验数据进行处理：使用线性预测函数建模，根据实测数据确定模型中各个参数，并对误差进行补偿，完善了厚度模型。实验结果表明：共焦系统的测量范围达到15 mm，测量精度为±3 μm，从而证明该方法是一种高精度的在线非接触测量方法。

关键词: 仪器仪表技术, 共焦法, 透明材料, 厚度测量, 线性回归

Abstract: In order to meet the requirement of measuring thickness of transparent materials for precision optical lens and glass container, etc., the polychromatic confocal method is used to measure the thickness of transparent material. The measuring principle of confocal system is introduced. A measuring structure scheme is proposed, and an experimental device is constructed and calibrated. The linear regression method is adopted to process the experimental data. The proposed method is to use linear prediction function to construct a mathematical model. The parameters in the model are determined using the measured data. The thickness model is improved by compensating error. The experimental results show that the measuring range of confocal system can reach 15 mm, and the accuracy of measurement is ±3 μm. The compound color confocal method is a kind of online non-contact measurement technique with high precision.

Key words: apparatus and instruments technology, confocal technology, transparent material, thickness measurement, linear regression

中图分类号:

TH741

安喆，徐熙平，乔杨，张宁，吕耀文. 基于复色共焦的透明材料厚度测量数据处理方法研究[J]. 兵工学报, 2016, 37(10): 1964-1968.

AN Zhe, XU Xi-ping, QIAO Yang, ZHANG Ning, LYU Yao-wen. Research on Approaches to Processing of Measured Thickness Data of Transparent Material Based on Polychromatic ConfocalTechnology[J]. Acta Armamentarii, 2016, 37(10): 1964-1968.

参考文献

［1］罗胜彬, 宋春华, 韦兴平, 等. 非接触测量技术发展研究综述[J]. 机床与液压,2013, 41(23):150-153.
LUO Sheng-bin, SONG Chun-hua, WEI Xing-ping, et al. Review for the development and research of non-contact measurement technology[J]. Machine Tool and Hydraulics, 2013, 41(23):150-153. (in Chinese)
[2] 陈文刚,丁建军. 几种测厚仪器的研究与应用[J]. 工业技术创新,2015，2（3）:380-384.
CHEN Wen-gang, DING Jian-jun. Research and application of some thickness gauges[J].Industrial Technology Innovation, 2015，2(3):380-384. (in Chinese)
[3] Shukla R P,Udupa D V,Das N C, et al. Non-destructive thickness measurement of dichromated gelatin films deposited on glass plates[J]. Optics and Laser Technology, 2006, 38(3):552-557.
[4］ Maruyama H, Inous S, Mitsuyama T, et al. Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness[J]. Applied Optics, 2002, 41(3): 1315-1322.
[5] Bing H, Cabestaing F. Narrow-band frequency analysis for laser-based glass thickness measurement[J]. Transactions on Instrumentation and Measurement, 2005, 54(1):222-227.
[6］孙晶玢. 基于差分激光三角法的水面油膜测厚系统光学传感器设计[D]. 天津：天津大学, 2010.
SUN Jing-bin. Research and development of optical sensor for oil film thickness measurement on the water surface based on differential laser trigonometry[D].Tianjin: Tianjin University, 2010. (in Chinese)
[7］王晓嘉，高隽，王磊．激光三角法综述[J]．仪器仪表学报，2004,25(4): 601-604.
WANG Xiao-jia, GAO Jun, WANG Lei. Overview of laser triangulation[J]. Chinese Journal of Scientific Instrument， 2004,25(4): 601-604. (in Chinese)
[8] 杨桂栓,陈涛,张志峰. 基于激光三角法对透明平板厚度测量光线补偿的研究及应用[J]. 中国激光,2015,42(7):219-226.
YANG Gui-shuan, CHEN Tao, ZHANG Zhi-feng.Study and application on transparent plate thickness measurement based on laser triangulation with light compensation[J]. Chinese Journal of Lasers,2015,42(7):219-226. (in Chinese)
[9］乔杨,张宁,徐熙平,等. 基于共焦法的透镜厚度测量系统设计[J]. 仪器仪表学报,2011,32(7):1635-1641.
QIAO Yang, ZHANG Ning, XU Xi-ping, et al. Design of lens thickness measurement system based on confocal technology[J]. Chinese Journal of Scientific Instrument, 2011,32(7):1635-1641. (in Chinese)

[1]	胡涛, 王栋, 孙曜, 黄震宇, 姜龙亭. 基于改进CRITIC-LRA和灰色逼近理想解排序法的空战威胁评估[J]. 兵工学报, 2020, 41(12): 2561-2569.
[2]	杨丽君，田洪刚，安立明，温银堂，罗小元. 基于同面电容成像的航天隔热复合材料粘接缺陷检测方法[J]. 兵工学报, 2017, 38(12): 2488-2496.
[3]	唐晨，张茂云，曹国华，丁红昌. 基于互相关的大型机组轴系激光对中微弱信号提取方法研究[J]. 兵工学报, 2017, 38(10): 2048-2054.
[4]	杨庆涛，王辉，朱新新，周平. 无水冷条件下温度与热流复合传感器设计与试验[J]. 兵工学报, 2016, 37(2): 193-202.
[5]	郝晓剑，桑涛，潘保武，周汉昌. 钽-氧化锆光纤黑体腔温度传感器特性参数测试[J]. 兵工学报, 2016, 37(2): 373-378.
[6]	高红俐，刘欢，齐子诚，刘辉，郑欢斌. 基于高速数字图像相关法的疲劳裂纹尖端位移应变场变化规律研究[J]. 兵工学报, 2015, 36(9): 1772-1781.
[7]	潘越，徐煕平，张帆，姜肇国，乔杨，李艳荻. 图像处理前照灯检测仪校准器自动检定系统[J]. 兵工学报, 2015, 36(5): 861-868.
[8]	孟立新，赵丁选，张立中，姜会林，李小明. 机载激光通信稳瞄吊舱设计与跟踪精度测试[J]. 兵工学报, 2015, 36(10): 1916-1923.
[9]	王洪迅，王士岩，王星，王红卫. 瞬时测频系统的线性调频信号分析及改进[J]. 兵工学报, 2014, 35(8): 1193-1199.
[10]	刘志浩, 高钦和, 牛海龙, 管文良, 李璟玥. 基于驱动端电流检测的电磁阀故障诊断研究[J]. 兵工学报, 2014, 35(7): 1083-1090.
[11]	王会峰，王晓艳，王炳健，关丽敏，汪贵平. 基于视觉序列图像分析的药室参数测量[J]. 兵工学报, 2014, 35(6): 782-788.
[12]	张东旭，杨平，杨峰，王詹帅，谢银辉，郭隐彪. 基于多体系统理论的精密检测平台空间误差建模与补偿[J]. 兵工学报, 2014, 35(4): 501-508.
[13]	江念, 王召巴, 金永, 陈友兴. 复合结构界面粘接质量的非线性超声检测[J]. 兵工学报, 2014, 35(3): 398-402.
[14]	孙媛，金鑫，叶鑫，张之敬，张晓峰. 面向中间尺度零件精密装配的微夹持器[J]. 兵工学报, 2014, 35(12): 2078-2086.
[15]	王超，张晓琳，唐文彦，王军，马强. 大尺寸箭弹质量特性测量过程中位姿标定方法研究[J]. 兵工学报, 2014, 35(1): 108-113.

基于复色共焦的透明材料厚度测量数据处理方法研究

Research on Approaches to Processing of Measured Thickness Data of Transparent Material Based on Polychromatic ConfocalTechnology

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 15

编辑推荐

Metrics

本文评价