基于支持度的椭球拟合微机械电子系统加速度计现场标定方法研究

doi:10.3969/j.issn.1000-1093.2020.01.008

兵工学报 ›› 2020, Vol. 41 ›› Issue (1): 68-74.doi: 10.3969/j.issn.1000-1093.2020.01.008

基于支持度的椭球拟合微机械电子系统加速度计现场标定方法研究

周泉，姚敏立，沈晓卫

（火箭军工程大学，陕西西安 710025）

收稿日期:2019-04-15 修回日期:2019-04-15 上线日期:2020-02-22
通讯作者: 姚敏立(1966—)，男，教授,博士生导师 E-mail:2812570356@qq.com
作者简介:周泉（1991—），男，硕士研究生。E-mail:305622940@qq.com
基金资助:
国家自然科学基金项目（61179005）

Research on Field Calibration Method for MEMS Accelerometer Based on Support Ellipsoid Fitting

ZHOU Quan, YAO Minli, SHEN Xiaowei

(Rocket Force University of Engineering, Xi'an 710025, Shaanxi, China)

Received:2019-04-15 Revised:2019-04-15 Online:2020-02-22

摘要/Abstract

摘要： 为解决微机械电子系统（MEMS）中加速度计的零位漂移误差、标度因数误差和交叉耦合误差随时间推移而变化的问题，提出一种基于支持度的椭球拟合MEMS加速度计现场标定方法。该方法能够在室外进行简单、快捷和高效的标定，其本质是在传统的椭球拟合法基础上，采用支持度法与椭球体法相结合的方法，通过建立椭球约束模型和支持度矩阵对MEMS加速度计的误差进行标定，继而使用误差补偿方程对MEMS加速度计进行输出补偿，最终实现高精度标度。通过椭球拟合对比实验和时间推移实验，证实了该方法可在没有精密标定设备情况下进行标定，其标定精度比传统椭球拟合法提升1倍。

关键词: 微机械电子系统加速度计, 支持度, 椭球拟合, 现场标定, 误差补偿

Abstract: In order to solve the problem that the zero drift error, scale factor error and cross-coupling error of accelerometer in the micro-electro mechanical system change with time, a calibration method based on the support degree ellipsoid fitting is proposed. The proposed method can be used easily, quickly and efficiently to calibrate the accelerometer outdoor. Based on the traditional ellipsoid fitting method, this method combines the support method with the ellipsoid method. An ellipsoid constraint model and the support matrix are established for calibrating the errors of the micro-electro-mechanical system (MEMS) accelerometer. Finally，the output of MEMS accelerometer is compensated by using an error compensation equation. It is proved by experiments that the proposed method can be used for calibrating without precision calibration equipment, and its calibration accuracy is twice of the traditional ellipsoid fitting method. Key

Key words: micro-electro-mechanicalsystemaccelerometer, supportdegree, ellipsoidfitting, fieldcalibration, errorcompensation

中图分类号:

TH824⁺.4

周泉，姚敏立，沈晓卫. 基于支持度的椭球拟合微机械电子系统加速度计现场标定方法研究[J]. 兵工学报, 2020, 41(1): 68-74.

ZHOU Quan, YAO Minli, SHEN Xiaowei. Research on Field Calibration Method for MEMS Accelerometer Based on Support Ellipsoid Fitting[J]. Acta Armamentarii, 2020, 41(1): 68-74.

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基于支持度的椭球拟合微机械电子系统加速度计现场标定方法研究

Research on Field Calibration Method for MEMS Accelerometer Based on Support Ellipsoid Fitting

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