The chip integration of MEMS (Micro-electromechanical system) safety and arming devices has a requirement to develop a miniature detonator technology , and the charge of detonator needs high sensitivity and large detonator output because of its small size. The in-situ preparation of energetic materials is used for researching the charge of Si-based micro-detonator, and the firing energy actually utilized by Si-based micro-detonator is explored using the current loop. Firing sensitivity is tested based on GJB/Z377A—1994 sensitivity test methods:Langlie, and the output is also qualitatively tested. The result shows that 50% of firing sensitivity is 7.89 V at 33 μF, and the detonator output can initiate CL-20.