一种新型压电式偏摆平台的设计与性能测试

doi:10.3969/j.issn.1000-1093.2018.05.015

摘要/Abstract

摘要： 设计了一种基于新型复合柔性铰链的紧凑型压电式偏摆平台。针对该平台，提出一种二级放大柔性驱动铰链机构，对其运动范围进行了解析求解和有限元分析；给出该压电偏摆平台的结构和工作原理，并测试了平台原型的偏摆角范围和固有频率；在偏摆角度标定的基础上开展了一系列开闭环实验，进行性能检验。实验结果表明:该偏摆平台的角度定位分辨力为1.5 μrad；基于闭环控制方法，对阶梯状阶跃信号进行定位的稳态峰峰值误差为4.2 μrad，处于稳态值±3 μrad之间,可以实现较好的定位效果；在准静态范围内对偏摆角的闭环定位控制比开环具有更好效果,闭环跟踪1 Hz三角波时的定位误差占满量程的1.9%，与开环误差25.0%相比具有明显下降。

关键词: 偏摆平台, 设计, 测试, 柔性机构, 迟滞非线性, 跟踪, 控制

Abstract: A compact piezo-scanning stage based on a novel compound flexible hinge is designed. A kind of flexible drive hinge with two-stage magnification is proposed for piezo-scanning stage. The motion range of its deflection angle is calculated by analytical calculation and finite element analysis, respectively. The structure and working principle of piezo-scanning stage is presented. The deflection angle range and resonant frequency of the stage prototype are tested. A series of experiments for open loop and closed loop controls are conducted to validate the performance of the stage after its deflection angle is calibrated. Experimental results show that the angle resolution of the stage is 1.5 μrad; better positioning performance can be achieved because the steady-state peak-to-valley error is 4.2 μrad within ±3 μrad of the final steady state value when a staircase step signal is positioned by closed loop control; better control effect of deflection angle can be obtained by closed loop control compared with open loop control in quasi-static operation mode, because the closed-loop positioning error is 1.9% with a significant decline while the open loop error is 25.0% of the whole range when 1 Hz triangle wave is tracked. Key

Key words: scanningstage, design, test, flexiblemechanism, hysteresisnonlinearity, tracking, control

中图分类号:

TH745.4

王耿，王帅旗. 一种新型压电式偏摆平台的设计与性能测试[J]. 兵工学报, 2018, 39(5): 952-960.

WANG Geng， WANG Shuai-qi. Design and Performance Test of a Novel Piezo-scanning Stage[J]. Acta Armamentarii, 2018, 39(5): 952-960.

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第39卷
第5期2018 年5月兵工学报ACTA
ARMAMENTARIIVol.39No.5May2018

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