Study on Influence of Micro-vibration During the Optical Aspheric Surface Ultra-precision Grinding on Forming Accuracy

doi:10.3969/j.issn.1000-1093.2012.09.008

Abstract

Abstract: In ultra-precision grinding process of the axial symmetric aspheric optical element, both imbalance of grinding wheel and micro-vibration of spindle would directly affect the forming accuracy and roughness. Analyzed the phenomenon of micro-vibration in grinding, a mathematical model of the aspheric surface's spherical radius deviation caused by the micro-vibration was established, and a dynamic high-precision micro-vibration measurement device with accuracy of 0.02 μm was developed. For the developed large-diameter ultra-precision aspheric grinding machine, the influence of the rotation speed of grinding wheel and spindle and the oil pressure of hydrostatic bearing on the radial and axial micro-vibration of grinding wheel and spindle was measured and analyzed. The parameters of the rotation speed of grinding wheel and the oil pressure of hydrostatic bearing and the rotation speed of spindle were determined to make the micro-vibrations of grinding wheel and spindle minimum. The machining results show that the error of aspheric surface of 500 mm in diameter can be less than 4 μm.

CLC Number:

TG58

ZHANG Xue-chen， CAO Guo-hua， NIE Feng-ming， WU Qing-tang. Study on Influence of Micro-vibration During the Optical Aspheric Surface Ultra-precision Grinding on Forming Accuracy[J]. Acta Armamentarii, 2012, 33(9): 1066-1069.

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