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Acta Armamentarii ›› 2022, Vol. 43 ›› Issue (8): 1998-2006.doi: 10.12382/bgxb.2021.0464

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Piezoelectric MEMS Accelerometer With d31 Mode Cantilever Structure

SHI Shuzheng1,2, GENG Wenping1, LIU Yong3, BI Kaixi1, LI Fen1, CHOU Xiujian1   

  1. (1.Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan 030051,Shanxi, China; 2.College of Mechanical Engineering, Hebei University of Architecture and Engineering, Zhangjiakou 075000,Hebei,China; 3.Anhui AKSO Medical Robot Co., Ltd., Chaohu 238008, Anhui, China)
  • Online:2022-05-30

Abstract: To meet the requirements for integrated manufacturing of highly sensitive passive accelerometers, a MEMS piezoelectric accelerometer sensitive structure with four integrating cantilevers picking up microsphere under d31 operating mode is proposed. The theoretical models of dynamic vibration and vibration picking are established, and the structure of the sensor is modeled and simulated by COMSOL 5.0 software. The geometric size and structure of the micro-device satisfying vibration picking conditions are determined by optimization. Heterogeneous integrated fabrication of high-quality PZT piezoelectric thin film based on silicon is realized by sol-gel method. Micro-device is fabricated by MEMS process and the sensor is assembled. The test results show that the relationship between the input acceleration and the output voltage of the accelerometer is V=1.881a-0.033 and the voltage sensitivity reaches 13.8 mV/g at 1 152 Hz, exhibiting good sensitivity, linearity, and anti-interference capability. The correctness of the research method and the feasibility of the manufacturing process are verified, providing a new technological approach for the high-performance acceleration sensor.

Key words: micro-electro-mechanicalsystem, d31piezoelectricaccelerometer, sensitivity, vibration-pickingmicrosphere, leadzirconatetitanate

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