[1] ZWAHLEN P, NGUYEN A M, DONG Y, et al. Navigation grade MEMS accelerometer[C]∥Proceedings of the 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems.Hong Kong, China:IEEE, 2010: 631-634. [2] SABATO A, NIEZRECKI C, FORTINO G, et al. Wireless MEMS-based accelerometer sensor boards for structural vibration monitoring: areview[J].IEEE Sensors Journal, 2016:226-235. [3] SONALI B, GOGOI A K.Design issues of piezoresistive MEMS accelerometer for an application specific medical diagnostic system[J].IETE Technical Review, 2016, 33(1):11-16. [4] WANG F, SONG G. Bolt early looseness monitoring using modified vibro-acoustic modulation by time-reversal[J]. Mechanical Systems and Signal Processing,2019, 130: 349-360. [5] 秦和平,于兰萍. 国内外惯性加速度计发展综述[C]∥2020年学术年会论文集.北京:中国航天电子技术研究院科学技术委员会, 2020: 187-201. QIN H P, YU L P. A review of the development of inertial accelerometers at home and abroad[C]∥Proceedings of Academy of Aerospace Electronic Technology in 2020.Beijing:Science and Technology Committee of China Academy of Aerospace Electronics Technology,2020: 187-201.(in Chinese) [6] 薛连莉,翟峻仪,葛悦涛. 2019年国外惯性技术发展与回顾[J].导航定位与授时,2020,7(1): 60-66. XUE L L, ZHAI J Y, GE Y T. Development and review of foreign inertial technology in 2019[J].Navigation, Positioning and Timing,2020,7(1): 60-66. (in Chinese) [7] 薛连莉,翟峻仪,葛悦涛.2020年国外惯性技术发展与回顾[J].导航定位与授时,2021,8(3):59-67. XUE L L, ZHAI J Y, GE Y T. Development and review of foreign inertial technology in 2020[J].Navigation, Positioning and Timing, 2021,8(3):59-67. (in Chinese) [8] YANG J, ZHANG M, SI C W, et al.A T-shape aluminum nitride thin-film piezoelectric MEMS resonant accelerometer[J].Journal of Microelectromechanical Systems, 2019, 28(5):776-781. [9] REGUIEGSK,GHEMARI Z, BENLIMANET,et al.Modeling and enhancement of piezoelectric accelerometer relative sensitivity[J]. Sensing and Imaging, 2019, 20:1-14. [10] SONGJL, HECD, WANGRX, et al.A mathematical model of a piezo-resistive eight-beam three-axis accelerometer with simulation and experimental validation[J]. Sensors, 2018, 18(11): 3641. [11] JUNG H I, KWON D S,KIM J, et al.Fabrication and characterization of monolithic piezoresistive high-g three-axis accelerometer[J]. Micro & Nano Systems Letters, 2017, 5(1):7. [12] GUPTAN,DUTTAS, PANCHALA, et al. Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure[J].Journal of Materials Science: Materials in Electronics, 2019, 30(16):15705-15714. [13] LI R,MOHAMMED Z, RASRAS M, et al.Design, modelling and characterization of comb drive MEMS gap-changeable differential capacitive accelerometer[J].Measurement, 2020, 169:108377. [14] LEE M K, HAN S H, PARK K H, et al. Design optimization of bulk piezoelectric acceleration sensor for enhanced performance[J]. Sensors, 2019, 19(15): 3360. [15] 薛亚楠,贾鹏宇,熊继军,等.氧化铝陶瓷无线无源加速度计的仿真与分析[J].传感技术学报,2020,33(8):1091-1097. XUE Y N, JIA P Y, XIONG J J, et al. Simulation and analysis of wireless passive accelerometer based on alumina ceramics[J].Journal of Sensor Technology,2020,33(8):1091-1097. (in Chinese) [16] TADIGADAPA S, MATETI K.Piezoelectric MEMS sensors: state-of-the-art and perspectives[J]. Measurement Science & Technology, 2009, 20(9):092001. [17] WILLAMS M. An AlN MEMS piezoelectric microphone for aeroacousticapplications[J]. Journal of Microelectromechanical Systems, 2012, 21(2):270-283. [18] EICHNER D, GIOUSOUF M, VON MNCH W. Measurements on micromachined silicon accelerometers with piezoelectric sensor action[J]. Sensors & Actuators A Physical, 1999, 76(1/2/3):247-252. [19] BEEBY S P, ROSS J N, WHITE N M.Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors[J].Journal of Micromechanics & Microengineering, 2000, 10(3):322-328. [20] HINDRICHSEN C C, THOMSEN E V, LOU-MOLLER R, et al.MEMS accelerometer with screen printed piezoelectric thick film[C]∥Proceedings of 2006 IEEE Sensors.Daegu, Korea:IEEE,2006. [21] HINDRICHSEN C C, ALMIND N S, BRODERSEN S H, et al.Analytical model of a PZT thick-film triaxial accelerometer for optimum design[J]. IEEE Sensors Journal, 2009, 9(4):419-429. [22] HINDRICHSEN C C, ALMIND N S, BRODERSEN S H, et al.Triaxial MEMS accelerometer with screen printed PZT thick film[J]. Journal of Electroceramics, 2010, 25(2/3/4):108-115. [23] TIAN B, LIU H Y,YANG N, et al.Design of a piezoelectric accelerometer with high sensitivity and low transverse effect[J]. Sensors, 2016, 16(10):1587. [24] XU M H,ZHOU H,ZHU L H, et al.Design and fabrication of a d33-mode piezoelectric micro-accelerometer[J]. Microsystem Technologies, 2019, 25(12):4465-4474. [25] LEE Y C, TSAI C C, LI C Y, et al.Fabrication and function examination of PZT-based MEMS accelerometers[J].Ceramics International,2021, 47(17):24458-24465. [26] SHEPARD J F, MOSES P J, TROLIER-MCKINSTR Y,et al.The wafer flexure technique for the determination of the transverse piezoelectric coefficient(d31) of PZT thin films[J].Sensors and Actuators A Physical,1998, 71(1/2):133-138. [27] YANG B, ZHU Y B, WANG X Z, et al.High performance PZT thick films based on bonding technique for d31 mode harvester with integrated proof mass[J].Sensors and Actuators A Physical, 2014, 214:88-94. [28] YU H G, WOLF R, KAN D, et al.Fabrication and performance of d33-mode lead-zirconate-titanate (PZT) MEMS accelerometers[J].SPIE Proceedings, 2001, 4559:130-137.
|