TY - Acta Armamentarii A1 - SHI Shuzheng, GENG Wenping, LIU Yong, BI Kaixi, LI Fen, CHOU Xiujian T1 - Piezoelectric MEMS Accelerometer With d31 Mode Cantilever Structure Y1 - 2022-05-30 00:00:00.0 JF - Acta Armamentarii JO - Acta Armamentarii SP - 1998 EP - 2006 VL - 43 IS - 8 UR - {http://www.co-journal.com/EN/10.12382/bgxb.2021.0464} N1 - 10.12382/bgxb.2021.0464 ER -