Improved Design and Experiment for Preparing Uniform Optical DLC Film by Large Area PLD

doi:10.3969/j.issn.1000-1093.2017.03.019

Abstract

Abstract: The former coating setup for uniform film is improved by considering the effect of the peripheral particles of plasma on the diamond-like carbon (DLC) film prepared by pulsed laser deposition (PLD). A shield with an aperture is inserted between the substrate and the target to remove the peripheral particles and only allow the centric particles pass the aperture. A corresponding module is added in the mathematical model for thickness distribution of film. The uniform diamond-like carbon film with 200 mm in diameter is prepared after simulation and optimization of model. The test results show that thickness variation of film is ±4.5%, and the thickness distribution characteristics are the same as the optimized results. Moreover, the nanohardness and infrared transmittance of film are apparently increased compared with those of the film prepared before improvement. Key

Key words: manufaturingtechnologyandequipment, opticalthinfilm, pulsedlaserdeposition, diamond-likecarbonfilm, largeareauniformfilm

CLC Number:

TN304.2

LU Yi-min, HUANG Guo-jun, GUO Yan-long, DING Fang-zheng, CHEN Xia, WEI Shang-fang, MI Chao-wei. Improved Design and Experiment for Preparing Uniform Optical DLC Film by Large Area PLD[J]. Acta Armamentarii, 2017, 38(3): 555-560.

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第38卷
第3期2017 年3月兵工学报ACTA
ARMAMENTARIIVol.38No.3Mar.2017

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