Vibration Cutting Analysis of Axially Moving Diamond Wire Saw Excited by Transverse Ultrasonic Wave

doi:10.3969/j.issn.1000-1093.2014.10.020

Abstract

Abstract: The diamond wire saw has been widely used in cutting the hard and brittle materials, such as Si and SiC single crystals, because of its narrow kerf and great flexibility. The ultrasonic vibration has a unique benefit in cutting the ultra-hard and brittle materials. Based on the analysis of vibration model of axially moving string, the expressions of transverse vibration displacement field in which the wire saw is excited in different positions by ultrasonic wave are solved by applying the separation-of-variables method, and the expression of system natural frequency is obtained, too. The effect of wire saw system parameters on natural frequency is discussed. The critical speed of wire saw is analyzed. The relation among the midpoint amplitude of wire saw excited by ultrasonic wave when wire saw reciprocatedly cuts and the parameters of wire saw system is analyzed. It is proposed that the feed speed of workpiece is a decisive factor affecting cutting mode of wire saw excited by ultrasonic wave. Doppler laser vibrometer is used to measure the natural frequency of wire saw, the vibration response frequency of wire saw excited by ultrasonic wave, and the frequencies of wire saw in different positions when wire saw cuts SiC ingot with ultrasonic vibration. Comparative experiments of cutting SiC are carried out with and without ultrasonic vibration.The result shows that cutting forces is reduced by 23%～38% with ultrasonic vibration cutting, and the quality of the cut surface is improved obviously. The measurement and experimental results are consistent with the analysis results of model.

Key words: manufaturing technology and equipment, diamond wire saw, ultrasonic excitation, forced vibration response, vibration cutting, comparative cutting experiment

CLC Number:

TH113.1

LI Lun， LI Shu-juan， Tang Ao-fei， LI Yan. Vibration Cutting Analysis of Axially Moving Diamond Wire Saw Excited by Transverse Ultrasonic Wave[J]. Acta Armamentarii, 2014, 35(10): 1651-1658.

References

［1］ Hardin C W, Qu J, Shih A J. Fixed abrasive diamond wire saw slicing of single-crystal silicon carbide wafers[J]. Materials and Manufacturing Processes, 2004, 19(2): 355-367.
[2] 曹凤国. 超声加工技术[M]. 北京：化学工业出版社，2004.
CAO Feng-guo.Ultrasonic machining technology[M].Beijing:Chemical Industry Press, 2004.(in Chinese)
[3] Zhou M . Brittle-ductile transition in the diamond cutting of glasses with the aid of ultrasonic vibration[J]. Journal of Materials Processing Technology, 2002, 121:243-251.
[4] 孟剑峰. 环形电镀金刚石线锯加工技术及加工质量研究[D]. 济南：山东大学，2006.
MENG Jian-feng. Research on processing technology and processing quality of endless electroplated diamond wire saw[D]. Jinan：Shandong University,2006. (in Chinese)
[5] 张辽远,贾春德,吕玉山.电镀金刚石线锯的超声纵振动切割加工方法[J].兵工学报，2006，27（5）：899-902.
ZHANG Liao-yuan, JIA Chun-de, LYU Yu-shan. A machining method on electroplated diamond wire saw with ultrasonic vibration[J]. Acta Armamentarii,2006，27（5）：899-902.(in Chinese)
[6] 张辽远．电镀金刚石线锯超声波切割实验装置的研制和加工机理的研究[D]．长春：长春理工大学，2007.
ZHANG Liao-yuan. Research of processing principle and development of experiment setup for electroplated diamond wire saw with ultrasonic vibration [D].Changchun:Changchun University of Science and Technology, 2007.(in Chinese)
[7] Nelson H M. Transverse vibration of a moving strip[J]. Journal of Sound and Vibration, 1979,65(3):381-389.
[8] 陈立群,Jean W Z. 轴向运动弦线的纵向振动及其控制[J]. 力学进展，2001，31（4）：535-546.
CHEN Li-qun,Jean W Z. Transverse vibration of axially moving strings and its control[J]. Advaces in Mechanics, 2001，31（4）：535-546.(in Chinese)
[9] CHEN L Q, ZhANG W, Jean W Z. Nonlinear dynamics for transverse motion of axially moving strings[J]. Chaos, Solitons and Fractals, 2009 (40):78-90.
[10] Hedrih K. Transversal forced vibrations of an axially moving sandwich belt system[J]. Archive of Applied Mechanics, 2008,78(9): 725-735.
[11] Wickert J A, Mote C D．Current research on the vibrations of an axially moving string[J]. Shock and Vibration Digest, 1988,20(5): 3-13.
[12] Oz H R.Current research on the vibration and stability of axially moving materials[J].Journal of Sound and Vibration, 2003, 259(2): 445-456.
[13] Wickert J A, Mote C D Jr. Classical vibration analysis of axially moving continua[J]. Transactions of the ASME, 1990, 57(9): 738-744.
[14] Alao Abdur-Rasheed. A fundamental study of vibration assisted machining[J].Advanced Materials Research,2011, 264/265: 1702-1707.
[15] Zhang L, Jean W Z. Nonlinear vibration of parametrically excited moving belt,partⅠ:dynamic response[J].Transactions of the ASME, 1990, 66(6): 396-402.

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