Design and Performance of Precision Symmetric Two-stage Micro-drive Amplification System
YANG Manzhi1,JING Gang1,GUO Wei1,ZHANG Chuanwei1,WU Hongzhang2,WEI Kaiyang1, LI Linyue1,L Zhenyang1,GUI Haochen1,ZHANG Xiaodong1
(1.College of Mechanical Engineering,Xi'an University of Science and Technology,Xi'an 710054,Shaanxi,China;2.Xi'an Institute of Metrology,Xi'an 710082,Shaanxi,China)
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