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兵工学报 ›› 2016, Vol. 37 ›› Issue (6): 1075-1081.doi: 10.3969/j.issn.1000-1093.2016.06.015

• 论文 • 上一篇    下一篇

基于“回”型阴极屏蔽板的平面电铸件厚度分布均匀性研究

李慧娟1, 明平美1, 周涛2, 赵云龙1, 秦歌1   

  1. (1.河南理工大学 机械与动力工程学院, 河南 焦作 454003; 2.昆山美微电子科技有限公司, 江苏 昆山 215334)
  • 收稿日期:2016-02-15 修回日期:2016-02-15 上线日期:2016-08-06
  • 作者简介:李慧娟(1989—),女,硕士研究生
  • 基金资助:
    国家自然科学基金项目(51475149); 河南省高等院校科技创新团队支持计划项目(15IRTSTHN013)

Research on Distribution Uniformity of Electroformed Metal Layer by Using Hollow Square Cathode-shielding Plate

LI Hui-juan1, MING Ping-mei1, ZHOU Tao2, ZHAO Yun-long1, QIN Ge1   

  1. (1.School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, Henan, China;2.Kunshan Microform Electronic Tech Co., Ltd, Kunshan 215334, Jiangsu, China)
  • Received:2016-02-15 Revised:2016-02-15 Online:2016-08-06

摘要: 为进一步提高大面积平面电铸件厚度分布的均匀性,提出一种改进型电铸工艺——阴极加设“回”字型屏蔽板并做周向等幅平面运动,并对此进行了数值分析与实验研究。研究结果表明:“回”字型屏蔽板结构参数与位置参数对阴极电流密度分布有很大影响,采用改进型电铸工艺能显著改善电铸层厚度的分布特性,基于新工艺制备约为100 μm厚的电铸层(大小70 mm×70 mm) 的厚度差小于8%.

关键词: 机械制造工艺与设备, 电铸, 厚度分布均匀性, 阴极屏蔽板, 阴极周向平动

Abstract: A modified electroforming approach is proposed to further improve the thickness uniformity of electroformed pieces with large areas. The proposed approach involves the addition of a hollow square cathode-shielding plate to the cathode which translates circumferentially. Some simulations and experiments were carried out to study the proposed method. The research results show that both geometrical feature parameters and placement positions of hollow square cathode-shielding plate have great effects on the cathode current density distribution. The thickness distribution of deposited metal can be significantly improved using the modified process in which thickness deviation of less than 8% is achieved for 100 μm thick deposit (70 mm×70 mm). The proposed electroforming approach is expected to provide an upgraded alternative for preparing the considerably uniform large-area flat electroformed layers.

Key words: manufacturing technology and equipment, electroforming, thickness distribution uniformity, cathode shielding plate, cathode circumferential translation

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