单晶硅电火花成形加工试验研究与工艺参数优化

doi:10.3969/j.issn.1000-1093.2017.09.024

兵工学报 ›› 2017, Vol. 38 ›› Issue (9): 1854-1861.doi: 10.3969/j.issn.1000-1093.2017.09.024

单晶硅电火花成形加工试验研究与工艺参数优化

辛彬¹，李淑娟¹，李玉玺²

（1.西安理工大学机械与精密仪器工程学院，陕西西安 710048; 2.西安现代控制技术研究所，陕西西安 710065）

收稿日期:2017-01-05 修回日期:2017-01-05 上线日期:2017-11-03
通讯作者: 李淑娟(1968—)，女，教授，博士生导师 E-mail:shujuanli@xaut.edu.cn
作者简介:辛彬(1984—)，男，博士研究生。E-mail：xinbin1227@163.com
基金资助:
国家自然科学基金项目（51575442）；陕西省自然科学基金项目（2016JZ011）；陕西省教育厅基金项目（2014SZS10-Z01）

Experimental Research and Optimization of Process Parameters in the Electrical Discharge Machining of Monocrystalline Silicon

XIN Bin¹， LI Shu-juan¹， LI Yu-xi²

(1.School of Mechanical and Instrumental Engineering， Xi'an University of Technology， Xi'an 710048， Shaanxi，China;2.Xi'an Modern Control Technology Research Institute, Xi'an 710065, Shaanxi, China)

Received:2017-01-05 Revised:2017-01-05 Online:2017-11-03

摘要/Abstract

摘要： 针对电火花加工过程中材料去除率、表面粗糙度和电极损耗这3个工艺目标不能同时兼顾的问题，以P型单晶硅为试验加工对象，采用中心组合设计试验考察峰值电流、脉冲宽度、脉冲间隔对单晶硅电火花成形加工过程中材料去除率、表面粗糙度以及电极损耗的影响，引入响应曲面法建立材料去除率、表面粗糙度和电极损耗的2阶关系模型，方差分析结果表明响应模型具有很好的拟合程度和适应性。进一步分析实际加工条件对工艺参数的约束，以提高材料去除率，降低表面粗糙度和电极损耗为目标建立工艺参数优化模型，设计基于带精英策略的非支配排序遗传算法对优化问题进行求解。在最优解条件下材料去除率的验证结果与理论最优值的平均相对误差为4.9%，表面粗糙度的验证结果与理论最优值的平均相对误差为5.2%，电极损耗的验证结果与理论最优值的平均相对误差为5.7%. 验证试验表明，该算法能实现硅材料放电成形加工过程的工艺参数优化。

关键词: 机械制造工艺与设备, 电火花成形加工, P型单晶硅, 材料去除率, 表面粗糙度, 电极损耗, 遗传算法

Abstract: In order to solve the problem that the material removal rate, the surface roughness and the electrode loss cannot be simultaneously taken into account in electrical discharge machining, the influences of peak current, pulse width and pulse interval on the material removal rate, surface roughness and electrode loss in the electrical discharge machining of P-type monocrystalline silicon are analyzed through central composite design experiments. The response surface method is used to establish a second-order relational model of material removal rate, surface roughness and electrode loss. The results of variance analysis indicate that the proposed model has good fitting degree and adaptability. A process parameter optimization model is established by analyzing the constraints of the actual processing conditions on the process parameters to improve the material removal rate in the electrical discharge machining of monocrystalline silicon, and reduce both the surface roughness and the electrode loss, and the NSGA- II–based algorithm is designed to solve the optimization problems. The average relative errors of validation results of material removal rate, surface roughness and electrode loss under the condition of the optimal solution are 4.9%, 5.2% and 5.7%, respectively, compared with the theoretical optimal values. The verification tests show that the proposed algorithm can achieve the process parameters optimization of silicon materials in the electrical discharge machining. Key

Key words: manufacturingtechnologyandequipment, electricaldischargemachining, P-typemonocrystallinesilicon, materialremovalrate, surfaceroughness, electrodeloss, geneticalgorithm

中图分类号:

TG661

辛彬，李淑娟，李玉玺. 单晶硅电火花成形加工试验研究与工艺参数优化[J]. 兵工学报, 2017, 38(9): 1854-1861.

XIN Bin， LI Shu-juan， LI Yu-xi. Experimental Research and Optimization of Process Parameters in the Electrical Discharge Machining of Monocrystalline Silicon[J]. Acta Armamentarii, 2017, 38(9): 1854-1861.

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第38卷
第9期2017 年9月兵工学报ACTA
ARMAMENTARIIVol.38No.9Sep.2017

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单晶硅电火花成形加工试验研究与工艺参数优化

Experimental Research and Optimization of Process Parameters in the Electrical Discharge Machining of Monocrystalline Silicon

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