一种电容式高量程微机械加速度计的设计分析

doi:10.3969/j.issn.1000-1093.2014.11.018

兵工学报 ›› 2014, Vol. 35 ›› Issue (11): 1860-1866.doi: 10.3969/j.issn.1000-1093.2014.11.018

一种电容式高量程微机械加速度计的设计分析

陶永康，刘云峰，董景新

(清华大学精密仪器系, 北京 100084)

收稿日期:2014-01-15 修回日期:2014-01-15 上线日期:2015-01-05
作者简介:陶永康(1989—)男博士研究生

Design and Analysis of a High-g Capacitive Micro-machined Accelerometer

TAO Yong-kang， LIU Yun-feng， DONG Jing-xin

(Department of Precision Instrument, Tsinghua University, Beijing 100084, China)

Received:2014-01-15 Revised:2014-01-15 Online:2015-01-05

摘要/Abstract

摘要： 针对特殊场合的高g值加速度测试需求，提出了一种叉齿电容式高量程微机械加速度计的结构形式，采用面内敏感的变面积差动电容变化方式，并针对传感器固有频率、横向效应、量程和加速度灵敏度进行了设计分析。仿真结果表明：该加速度计量程200 000 g，固有频率266.2 kHz，模态分离比大于2.5，0~10 kHz通频带内加速度分辨率优于60 g. 基于硅-玻璃微机械工艺进行了加速度计微结构的流片加工、镜检测试和传感器的初步冲击实验验证。相比已有的高量程微机械加速度计，该设计具有线性度好、横向效应小、加速度灵敏度高和抗高过载能力强等特点。

关键词: 电子技术, 高g值加速度计, 电容式微机械加速度计, 微机电系统, 仿真设计

Abstract: A kind of high-g capacitive micro-machined accelerometer with comb structure is proposed for the special demand of high-g acceleration test. It is an in-plane sensitive accelerometer with area-variable differential capacitance. The natural frequency, transverse effect, measuring range and acceleration sensitivity of sensor are designed and analyzed. Simulation results show that, the measuring range of the designed accelerometer is 200 000 g with the acceleration resolution of better than 60 g in 0-10 kHz bandwidth; its natural frequency is 266.2 kHz , and the modal separation ratio is more than 2.5. It is fabricated by silicon-on-glass MEMS technology. The test and the primary shock experiment of sensor are performed. Compared with the existing high-g micro-machined accelerometers, the designed accelerometer has good linearity, small transverse effect, high acceleration sensitivity and strong ability to resist high overload.

Key words: electronic technology, high-g accelerometer, capacitive micro-machined accelerometer, micro-electro-mechanical system, simulation design

中图分类号:

陶永康，刘云峰，董景新. 一种电容式高量程微机械加速度计的设计分析[J]. 兵工学报, 2014, 35(11): 1860-1866.

TAO Yong-kang， LIU Yun-feng， DONG Jing-xin. Design and Analysis of a High-g Capacitive Micro-machined Accelerometer[J]. Acta Armamentarii, 2014, 35(11): 1860-1866.

参考文献

［1］李世维, 王群书, 古仁红, 等. 高g值微机械加速度传感器的现状与发展[J]. 仪器仪表学报, 2008, 29(4): 892-896.
LI Shi-wei, WANG Qun-shu, GU Ren-hong, et al. Situation and trend of high-g micro-machined accelerometer [J]. Chinese Journal of Scientific Instrument, 2008, 29(4): 892-896. (in Chinese)
[2］徐鹏, 祖静, 范锦彪. 高g值侵彻加速度测试及其相关技术研究进展[J]. 兵工学报, 2011, 32(6): 739-745.
XU Peng, ZU Jing, FAN Jin-biao. Research developments of high g penetration acceleration test and its correlative technology [J]. Acta Armamentarii, 2011, 32(6): 739-745. (in Chinese)
[3］赵小龙, 马铁华, 范锦彪. 弹载常用芯片在高g值冲击下的失效分析[J]. 仪器仪表学报, 2013, 34(10): 2358-2364.
ZHAO Xiao-long, MA Tie-hua, FAN Jin-biao. Failure analysis of common missile-borne chip in high g shock [J]. Chinese Journal of Scientific Instrument, 2013, 34(10): 2358-2364.(in Chinese)
[4］董景新. 微惯性仪表——微机械加速度计[M]. 北京：清华大学出版社，2002.
DONG Jing-xin. Micro inertial instruments—micro machined accelerometer [M]. Beijing: Tsinghua University Press, 2002. (in Chinese)
[5］ Hartzell A L, Shea H R. MEMS reliability [M]. New York: Springer, 2011.
[6］ Harris C M, Piersol A G. Harris' shock and vibration handbook[M].New York: McGraw-Hill, 2002.
[7］刘民杰, 池保勇, 刘云峰, 等. 具有零偏补偿功能的电容式微加速度计接口电路[J]. 清华大学学报: 自然科学版, 2010,50(11): 1815-1819.
LIU Min-jie, CHI Bao-yong, LIU Yun-feng, et al. Interface circuit with zero compensation function for capacitive micro-accelerometers [J]. Journal of Tsinghua University： Science and Technology, 2010,50(11): 1815-1819. (in Chinese)
[8］ Dong P, Li X, Yang H, et al. High-performance monolithic triaxial piezoresistive shock accelerometers[J]. Sensors and Actuators A: Physical, 2008, 141(2): 339-346.
[9］石云波, 祁晓瑾, 刘俊，等. MEMS高g值加速度传感器设计[J]. 系统仿真学报, 2008, 20(16): 4306-4309.
SHI Yun-bo, QI Xiao-jin, LIU Jun, et al. Design of MEMS high g accelerometer [J]. Journal of System Simulation, 2008, 20(16): 4306-4309. (in Chinese)

[1]	石树正，耿文平，刘勇，毕开西，李芬，丑修建. d₃₁模式四悬臂梁压电MEMS加速度计[J]. 兵工学报, 2022, 43(8): 1998-2006.
[2]	解瑞珍，褚恩义，戴旭涵，苏谦，薛艳，任小明，刘兰，刘卫. 微起爆序列设计及传爆与隔爆性能[J]. 兵工学报, 2021, 42(6): 1178-1184.
[3]	董进龙, 莫波. 典型弹道下的火箭弹MEMS-INS/GNSS组合导航姿态误差可观性分析[J]. 兵工学报, 2014, 35(6): 850-856.
[4]	卢冲赢，徐立新，李建华，付博，欧修龙. CMOS兼容高Q值微机电系统悬浮片上螺旋电感[J]. 兵工学报, 2014, 35(5): 634-639.
[5]	李延宁, 阮勇, 尤政, 徐宏伟, 黎玉刚. 叉指式高 Q 值可变电容仿真设计[J]. 兵工学报, 2013, 34(10): 1236-1242.
[6]	黄敬健，杨勇，谭渊，袁乃昌. 基于电容性膜板加载的新型雷达宽带隔离设计[J]. 兵工学报, 2012, 33(5): 579-582.
[7]	陈中起，于雷，鲁艺，周中良. 对抗雷达网最优电子战布阵研究[J]. 兵工学报, 2012, 33(1): 89-94.

一种电容式高量程微机械加速度计的设计分析

Design and Analysis of a High-g Capacitive Micro-machined Accelerometer

PDF

可视化

被引次数

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 7

编辑推荐

Metrics

本文评价