d31模式四悬臂梁压电MEMS加速度计

doi:10.12382/bgxb.2021.0464

摘要/Abstract

摘要： 针对高灵敏度无源加速度计的集成制造需求，提出一种d₃₁工作模式下四悬臂梁集成拾振微球的MEMS压电加速度计敏感结构。建立动力学振动和拾振理论模型，并使用COMSOL 5.0软件对传感器件结构进行建模仿真，通过优化确定满足拾振条件的微器件几何尺寸和结构。利用溶胶凝胶方法实现硅基高品质PZT压电薄膜的异质集成制造，使用MEMS工艺制造微器件并完成传感器的集成和组装。测试结果表明：该加速度计的输入加速度与输出电压的关系为V=1.881a-0.033，电压灵敏度在1 152 Hz时达到13.8 mV/g，表现出良好的灵敏度、线性度和抗干扰能力；新方法具有正确性和工艺方法的可行性，为高性能加速度传感器件提供了一种新的技术途径。

关键词: 微机电系统, d₃₁压电加速度计, 灵敏度, 拾振微球, 锆钛酸铅

Abstract: To meet the requirements for integrated manufacturing of highly sensitive passive accelerometers, a MEMS piezoelectric accelerometer sensitive structure with four integrating cantilevers picking up microsphere under d₃₁ operating mode is proposed. The theoretical models of dynamic vibration and vibration picking are established, and the structure of the sensor is modeled and simulated by COMSOL 5.0 software. The geometric size and structure of the micro-device satisfying vibration picking conditions are determined by optimization. Heterogeneous integrated fabrication of high-quality PZT piezoelectric thin film based on silicon is realized by sol-gel method. Micro-device is fabricated by MEMS process and the sensor is assembled. The test results show that the relationship between the input acceleration and the output voltage of the accelerometer is V=1.881a-0.033 and the voltage sensitivity reaches 13.8 mV/g at 1 152 Hz, exhibiting good sensitivity, linearity, and anti-interference capability. The correctness of the research method and the feasibility of the manufacturing process are verified, providing a new technological approach for the high-performance acceleration sensor.

Key words: micro-electro-mechanicalsystem, d₃₁piezoelectricaccelerometer, sensitivity, vibration-pickingmicrosphere, leadzirconatetitanate

中图分类号:

石树正，耿文平，刘勇，毕开西，李芬，丑修建. d₃₁模式四悬臂梁压电MEMS加速度计[J]. 兵工学报, 2022, 43(8): 1998-2006.

SHI Shuzheng, GENG Wenping, LIU Yong, BI Kaixi, LI Fen, CHOU Xiujian. Piezoelectric MEMS Accelerometer With d₃₁ Mode Cantilever Structure[J]. Acta Armamentarii, 2022, 43(8): 1998-2006.

参考文献

［1］ ZWAHLEN P, NGUYEN A M, DONG Y, et al. Navigation grade MEMS accelerometer［C］∥Proceedings of the 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems.Hong Kong, China:IEEE, 2010: 631-634.
［2］ SABATO A, NIEZRECKI C, FORTINO G, et al. Wireless MEMS-based accelerometer sensor boards for structural vibration monitoring: areview［J］.IEEE Sensors Journal, 2016:226-235.
［3］ SONALI B, GOGOI A K.Design issues of piezoresistive MEMS accelerometer for an application specific medical diagnostic system［J］.IETE Technical Review, 2016, 33(1):11-16.
［4］ WANG F, SONG G. Bolt early looseness monitoring using modified vibro-acoustic modulation by time-reversal［J］. Mechanical Systems and Signal Processing,2019, 130: 349-360.
［5］秦和平,于兰萍. 国内外惯性加速度计发展综述［C］∥2020年学术年会论文集.北京:中国航天电子技术研究院科学技术委员会, 2020: 187-201.
QIN H P, YU L P. A review of the development of inertial accelerometers at home and abroad［C］∥Proceedings of Academy of Aerospace Electronic Technology in 2020.Beijing:Science and Technology Committee of China Academy of Aerospace Electronics Technology,2020: 187-201.(in Chinese)
［6］薛连莉,翟峻仪,葛悦涛. 2019年国外惯性技术发展与回顾［J］.导航定位与授时,2020,7(1): 60-66.
XUE L L, ZHAI J Y, GE Y T. Development and review of foreign inertial technology in 2019［J］.Navigation, Positioning and Timing,2020,7(1): 60-66. (in Chinese)
［7］薛连莉,翟峻仪,葛悦涛.2020年国外惯性技术发展与回顾［J］.导航定位与授时,2021,8(3):59-67.
XUE L L, ZHAI J Y, GE Y T. Development and review of foreign inertial technology in 2020［J］.Navigation, Positioning and Timing, 2021,8(3):59-67. (in Chinese)
［8］ YANG J, ZHANG M, SI C W, et al.A T-shape aluminum nitride thin-film piezoelectric MEMS resonant accelerometer［J］.Journal of Microelectromechanical Systems, 2019, 28(5):776-781.
［9］ REGUIEGSK,GHEMARI Z, BENLIMANET,et al.Modeling and enhancement of piezoelectric accelerometer relative sensitivity［J］. Sensing and Imaging, 2019, 20:1-14.
［10］ SONGJL, HECD, WANGRX, et al.A mathematical model of a piezo-resistive eight-beam three-axis accelerometer with simulation and experimental validation［J］. Sensors, 2018, 18(11): 3641.
［11］ JUNG H I, KWON D S,KIM J, et al.Fabrication and characterization of monolithic piezoresistive high-g three-axis accelerometer［J］. Micro & Nano Systems Letters, 2017, 5(1):7.
［12］ GUPTAN,DUTTAS, PANCHALA, et al. Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure［J］.Journal of Materials Science: Materials in Electronics, 2019, 30(16):15705-15714.
［13］ LI R,MOHAMMED Z, RASRAS M, et al.Design, modelling and characterization of comb drive MEMS gap-changeable differential capacitive accelerometer［J］.Measurement, 2020, 169:108377.
［14］ LEE M K, HAN S H, PARK K H, et al. Design optimization of bulk piezoelectric acceleration sensor for enhanced performance［J］. Sensors, 2019, 19(15): 3360.
［15］薛亚楠,贾鹏宇,熊继军,等.氧化铝陶瓷无线无源加速度计的仿真与分析［J］.传感技术学报,2020,33(8):1091-1097.
XUE Y N, JIA P Y, XIONG J J, et al. Simulation and analysis of wireless passive accelerometer based on alumina ceramics［J］.Journal of Sensor Technology,2020,33(8):1091-1097. (in Chinese)
［16］ TADIGADAPA S, MATETI K.Piezoelectric MEMS sensors: state-of-the-art and perspectives［J］. Measurement Science & Technology, 2009, 20(9):092001.
［17］ WILLAMS M. An AlN MEMS piezoelectric microphone for aeroacousticapplications［J］. Journal of Microelectromechanical Systems, 2012, 21(2):270-283.
［18］ EICHNER D, GIOUSOUF M, VON MNCH W. Measurements on micromachined silicon accelerometers with piezoelectric sensor action［J］. Sensors & Actuators A Physical, 1999, 76(1/2/3):247-252.
［19］ BEEBY S P, ROSS J N, WHITE N M.Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors［J］.Journal of Micromechanics & Microengineering, 2000, 10(3):322-328.
［20］ HINDRICHSEN C C, THOMSEN E V, LOU-MOLLER R, et al.MEMS accelerometer with screen printed piezoelectric thick film［C］∥Proceedings of 2006 IEEE Sensors.Daegu, Korea:IEEE,2006.
［21］ HINDRICHSEN C C, ALMIND N S, BRODERSEN S H, et al.Analytical model of a PZT thick-film triaxial accelerometer for optimum design［J］. IEEE Sensors Journal, 2009, 9(4):419-429.
［22］ HINDRICHSEN C C, ALMIND N S, BRODERSEN S H, et al.Triaxial MEMS accelerometer with screen printed PZT thick film［J］. Journal of Electroceramics, 2010, 25(2/3/4):108-115.
［23］ TIAN B, LIU H Y,YANG N, et al.Design of a piezoelectric accelerometer with high sensitivity and low transverse effect［J］. Sensors, 2016, 16(10):1587.
［24］ XU M H,ZHOU H，ZHU L H, et al.Design and fabrication of a d₃₃-mode piezoelectric micro-accelerometer［J］. Microsystem Technologies, 2019, 25(12):4465-4474.
［25］ LEE Y C, TSAI C C, LI C Y, et al.Fabrication and function examination of PZT-based MEMS accelerometers［J］.Ceramics International,2021, 47(17):24458-24465.
［26］ SHEPARD J F, MOSES P J, TROLIER-MCKINSTR Y,et al.The wafer flexure technique for the determination of the transverse piezoelectric coefficient(d₃₁) of PZT thin films［J］.Sensors and Actuators A Physical,1998, 71(1/2):133-138.
［27］ YANG B, ZHU Y B, WANG X Z, et al.High performance PZT thick films based on bonding technique for d₃₁ mode harvester with integrated proof mass［J］.Sensors and Actuators A Physical, 2014, 214:88-94.
［28］ YU H G, WOLF R, KAN D, et al.Fabrication and performance of d₃₃-mode lead-zirconate-titanate (PZT) MEMS accelerometers［J］.SPIE Proceedings, 2001, 4559:130-137.

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d₃₁模式四悬臂梁压电MEMS加速度计

Piezoelectric MEMS Accelerometer With d₃₁ Mode Cantilever Structure

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