微凹坑超声电解滚蚀加工间隙多物理场特性及成形规律

doi:10.3969/j.issn.1000-1093.2020.04.017

摘要/Abstract

摘要： 针对径向超声能场滚蚀微细电解加工（RUR-EMM）间隙物理场变化复杂、能观性较差等问题，基于数值模拟方法，对加工中间隙多物理场耦合作用及变化规律进行研究。建立加工间隙内电场、两相流场、温度场、声场等多场耦合理论模型，通过数值仿真分析得出多场耦合相互影响变化规律、多场耦合下凹坑成型规律。研究结果表明：在振动频率20 kHz、振幅10 μm、加工间隙50 μm、工具阴极旋转角速度0.6°/s、电解液电导率7.9 S/m工况下，超声能场激励微细电解加工中，间隙内电解液周期性流入、流出加工区；电流密度随振动周期发生周期性变化；电解液温度随超声激励与电化学反应的综合作用升高；与滚蚀微细电解加工相比，RUR-EMM间隙内温度上升3.63%、电流密度提高1.45倍，间隙脉动流场有效促进了产物排出，RUR-EMM凹坑深度最大增加14.21%；微凹坑加工试验结果验证了理论模型的正确性，仿真与实际加工试验深度误差在17.07%以内。

关键词: 微细电解加工, 微凹坑, 超声振动, 滚蚀加工, 多物理场

Abstract: For the complex physical change and poor observability of the radial ultrasound rolling eletrochemical micromachining (RUR-EMM) gap physics field, the coupling effect of multi-physical field in machining gap is studied based on the numerical simulation method. A multi-field coupling theory model of electric field, two-phase flow field, temperature field and sound field in machining gap is established. Based on the proposed model, the variation rule of multi-field coupling interaction and the forming rule of micro dimple under multi-field coupling are obtained by numerical simulation method. Results show that the electrolyte in the gap flows into and out of the machining zone with vibration frequency of 20 kHz, amplitude of 10 μm, machining gap of 50 μm, cathode rotating angular velocity of 0.6°/s, and electrode conductivity of 7.9 S/m. The current density periodically changes with vibration cycle, and the temperature of electrolyte increases with the combined action of ultrasonic vibration and electrochemical reaction. Compared with rolling electrochemical micromachining (R-EMM), the gap temperature and current density of RUR-EMM are increased by 3.63% and 1.45 times, respectively, and the dimple depth of RUR-EMM is increased by 14.21%. This is because the pulsating flow field in the gap promotes the discharge of products effectively. The experimental results of micro-dimple machining verify the correctness of the theoretical model. The error between the simulated and experimental machining depths is less than 17.07%. Key

Key words: electrochemicalmicromachining, micro-dimple, ultrasoundvibration, rollingmachining, multi-physicalfield

中图分类号:

TG662

王明环，王嘉杰，童文俊，陈侠，许雪峰，王芯蒂. 微凹坑超声电解滚蚀加工间隙多物理场特性及成形规律[J]. 兵工学报, 2020, 41(4): 783-791.

WANG Minghuan， WANG Jiajie， TONG Wenjun， CHEN Xia， XU Xuefeng， WANG Xindi. Multi-physical Field in IEG and Micro-dimple Forming in Ultrasonic Rolling Electrochemical Micromachining[J]. Acta Armamentarii, 2020, 41(4): 783-791.

参考文献

［1］ BRUZZONE A A G, COSTA H L, LONARDO P M, et al. Advances in engineered surfaces for functional performance［J］. CIRP Annals-Manufacturing Technology, 2008, 57(2):750-769.
［2］ SCHEY J A, NAUTIYAL P C. Effects of surface roughness on friction and metal transfer in lubricated sliding of aluminium alloys against steel surfaces［J］. Wear, 1991, 146(1):37-51.
［3］符永宏, 王祖权, 纪敬虎, 等. SiC机械密封环表面微织构激光加工工艺［J］. 排灌机械工程学报, 2012, 30(2):209-213.
FU Y H, WANG Z Q, JI J H, et al. Laser processing technology for surface micro-texture of SiC mechanical seal ring［J］. Journal of Drainage and Irrigation Machinery Engineering, 2012, 30(2):209-213.(in Chinese)
［4］ MOON Y H, LEE E S, PARK J W. A study on electrochemical micromachining for fabrication of microgrooves in an air-lubricated hydrodynamic bearing［J］. The International Journal of Advanced Manufacturing Technology, 2002, 20(10):720-726.
［5］ BECHERT D W, BRUSE M, HAGE W. Experiments with three-dimensional riblets as an idealized model of shark skin［J］. Experiments in Fluids, 2000, 28(5):403-412.
［6］徐家文, 云乃彰, 王建业. 电化学加工技术:原理·工艺及应用［M］. 北京:国防工业出版社, 2008.
XU J W, YUN N Z, WANG J Y. Electrochemical processing technology: principle, technology and application［M］. Beijing:National Defense Industry Press, 2008. （in Chinese）
［7］朱荻. 国外电解加工的研究进展［J］. 电加工与模具, 2000(1): 13-18.
ZHU D. The latest advances and the principal issues in ECM ［J］. Electromaching and Mould, 2000(1): 13-18.（in Chinese）
［8］周小超, 曹昌勇. 基于COMSOL电解加工温度场仿真［J］.齐齐哈尔大学学报(自然科学版),2018,34(4):41-44.
ZHOU X C, CAO C Y. Temperature field simulation of electrochemical machining based on COMSOL［J］. Journal of Qiqihar University (Natural Science Edition), 2018, 34(4): 41-44.（in Chinese）
［9］王明环，刘望生，彭伟.螺旋深小孔电解加工间隙多相流场特性及实验研究［J］.兵工学报，2013，34(6):748-753.
WANG M H, LIU W S, PENG W. Research on flow-field characteristics of gap multiphase flow and experiment of electrochemical machining of spiral deep small hole［J］. Acta Armamentarii,2013,34(6):748-753. (in Chinese)

［10］ WANG M H, TONG W J, QIU G Z, et al. Multiphysics study in air-shielding electrochemical micromachining［J］. Journal of Manufacturing Processes, 2019, 43(Part A):124-135.
［11］ RUSZAJ A, ZYBURA M, Z·UREK R, et al. Some aspects of the electrochemical machining process supported by electrode ultrasonic vibrations optimization［J］. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2003, 217(10):1365-1371.
［12］ WANG M H, ZHANG Y B, HE Z W, et al. Deep micro-hole fabrication in EMM on stainless steel using disk micro-tool assisted by ultrasonic vibration［J］. Journal of Materials Processing Technology, 2016, 229:475-483.
［13］ HEWIDY M S, EBEID S J, El-TAWEEL T A, et al. Modelling the performance of ECM assisted by low frequency vibrations［J］. Journal of Materials Processing Technology, 2007, 189(1/2/3):466-472.
［14］ BHATTACHARYYA B, MALAPATI M, MUNDA J, et al. Influence of tool vibration on machining performance in electrochemical micro-machining of copper［J］. International Journal of Machine Tools and Manufacture, 2007, 47(2):335-342.
［15］朱永伟, 王占和, 李红英, 等. 电解复合超声频振动微细加工机理与试验研究［J］. 中国机械工程, 2008，19(15): 1786-1792.
ZHU Y W, WANG Z H, LI H Y, et al. Machining mechanism and test study on micro-machining of ECM combined ultrasonic vibration［J］. China Mechanical Engineering, 2008，19(15): 1786-1792. （in Chinese）
［16］朱永伟, 王占和, 云乃彰. 超声电解复合微细加工装置与试验研究［J］. 机械科学与技术, 2008(8):986-991.
ZHU Y W, WANG Z H, YUN N Z. An ECM combined ultraso-nic vibrating micro-machining device and its test study［J］. Mechanical Science and Technology, 2008(8): 986-991. （in Chinese）
［17］李红英, 云乃彰, 朱永伟. 超声电解复合微细加工硬质合金试验研究［J］. 航空制造技术, 2009(1):78-82.
LI H Y, YUN N Z, ZHU Y W. Experimental investigation of combined ultrasonic and electrochemical micro-machining of cemented Ca［J］. Aviation Manufacturing Technology, 2009(1): 78-82. （in Chinese）
［18］赵志强. 超声扰动电解液微细电解加工机理与实验的基础研究［D］. 青岛:青岛科技大学, 2014.
ZHAO Z Q. The fundamental research of machining mechanism and experiment in ultrasonic disturbed electrolyte micro-electrochemical machining［D］. Qingdao:Qingdao University of Science and Technology, 2014. （in Chinese）
［19］王刚, 安琳. COMSOL Multiphysics工程实践与理论仿真［M］. 北京:电子工业出版社, 2012.
WANG G, AN L. COMSOL Multiphysics engineering practice and theoretical simulation［M］. Beijing:Publishing House of Electronic Industry, 2012. （in Chinese）
［20］ DECONINCK D, DAMME S V, ALBU C, et al. Study of the effects of heat removal on the copying accuracy of the electrochemical machining process［J］. Electrochimica Acta, 2011, 56(16): 5642-5649.
［21］吴文华, 翟薇, 胡海豹, 等. 液体材料超声处理过程中声场和流场的分布规律研究［J］. 物理学报, 2017, 66(19):148-156.
WU W H, ZHAI W, HU H B, et al. Study on the distribution of sound field and flow field in the ultrasound treatment of liquid materials［J］. Acta Physica Sinica, 2017, 66(19): 148-156. （in Chinese）
［22］李志永, 朱荻. 基于间隙电导率模型的叶片电解加工阴极设计［J］. 华南理工大学学报(自然科学版), 2005, 33(3): 73-77.
LI Z Y, ZHU D. Cathode design in electrochemical machining of blades based on conductivity mathematical model in machining gap［J］. Journal of South China University of Technology (Natural Science Edition), 2005,33(3): 73-77. （in Chinese）

第41卷第4期2020 年4月
兵工学报ACTA ARMAMENTARII
Vol.41No.4Apr.2020

[1]	林庆华，栗保明. 基于瞬态多物理场求解器的电磁轨道炮发射过程建模与仿真[J]. 兵工学报, 2020, 41(9): 1697-1707.
[2]	柏朗，李言，杨明顺，李玉玺，林允博，赵仁峰. 静压支撑-超声振动单点增量成形件几何误差试验研究[J]. 兵工学报, 2020, 41(6): 1219-1226.
[3]	杨明顺，肖旭东，姚志远，袁启龙，李言，李玉玺. 1060铝板超声振动单点增量成形极限研究[J]. 兵工学报, 2019, 40(3): 601-611.
[4]	崔博，张宏，刘双宇，刘凤德. 高氮钢复合焊接接头氮含量和气孔控制方法研究[J]. 兵工学报, 2019, 40(11): 2311-2318.
[5]	张永胜，鲁军勇，谭赛，李白，武晓康，娄建勇. 连续电磁发射过程中轨道受力分析[J]. 兵工学报, 2018, 39(3): 618-624.
[6]	郑建新，刘威成，段玉涛. 7075铝合金二维超声挤压加工表面质量影响因素及其交互作用研究[J]. 兵工学报, 2017, 38(6): 1231-1238.
[7]	高航，孙超，冉冲，张欣，李丽丽. 叠层复合材料超声振动辅助螺旋铣削制孔工艺的试验研究[J]. 兵工学报, 2015, 36(12): 2342-2349.
[8]	李文, 王晓梅, 徐明刚, 张德远, 陈华伟. 深孔数控变径超声椭圆振动镗削加工方法研究[J]. 兵工学报, 2013, 34(8): 1021-1027.
[9]	张成茂, 张德远. 导套式椭圆超声镗削模拟实验研究[J]. 兵工学报, 2013, 34(4): 465-470.
[10]	赵波, 卞平艳. 超声振动对非局部弹性核函数影响的试验研究[J]. 兵工学报, 2013, 34(10): 1291-1297.
[11]	唐维1-3，魏智勇1，黄交虎1，刘维1，刘彤2，章定国3. 高聚物粘结炸药模拟材料的超声振动切削试验研究[J]. 兵工学报, 2013, 34(1): 30-35.
[12]	张洪丽，张建华. 切向超声振动辅助磨削对单颗粒切削力的影响[J]. 兵工学报, 2011, 32(4): 487-492.
[13]	王振龙，迟关心，狄士春，赵万生. 钛合金深小孔的微细超声电火花加工技术[J]. 兵工学报, 2000, 21(4): 346-349.
[14]	杨继先，张永宏，杨素梅等. 陶瓷深孔精密高效加工的新方法——超声振动磨削[J]. 兵工学报, 1998, 19(3): 287-288.