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Welcome to Acta Armamentarii ! Today is
Responsible Institution: China Association for Science and Technology
Sponsor: China Ordnance Society
ISSN 1000-1093 CN 11-2176/TJ
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Chinese
Contact Pressure Distribution During Chemical Mechanical Polishing with Bionic CuttingPolishing Pad
LU Yu-shan, ZHANG Liao-yuan, WANG Ju, WANG Wu-gang
Acta Armamentarii . 2012, (
5
): 617 -622 . DOI: 10.3969/j.issn.1000-1093.2012.05.019
