Preparation Technology of CVD Molybdenum Composite Coating on Surface of Titanium Alloy

doi:10.3969/j.issn.1000-1093.2020.11.020

Abstract

Abstract: A well-bonded molybdenum coating is prepared on the surface of titanium matrix, and the corrosion resistance and wear resistance of titanium alloy are improved to provide a basis for further preparation of MoS₂ and MoSi₂ coating. Magnetron sputtering and chemical vapor deposition (CVD) methods are used to prepare the molybdenum composite coating on the titanium matrix. The bonding force between molybdenum composite coating and titanium matrixe prepared by magnetron sputtering and CVD was tested and analyzed. The binding force between molybdenum composite coatings prepared by different methods and the titanium matrix was test and analyzed. The structure, composition, microstructure, hardness and wear resistance of molybdenum composite coating were analyzed. Results show that tungsten and molybdenum are deposited by CVD after magnetron sputtering of Cu on the titanium matrix, the critical load of composite coating increased to 168.5 N, the surface hardness increased to 649.3 HV, and the wear rate reduced from 0.035% to 0.007 3%. The Cu/W composite transition layer prepared by combining magnetron sputtering Cu and CVD W on the titanium surface can effectively prevent hydrogen embrittlement and corrosion on the surface of titanium matrix, the binding force between the molybdenum coating and the titanium matrix is significantly improved. The hardness and wear resistance of titanium matrix surface are significantly enhanced.

Key words: titaniumalloy, chemicalvapordeposition, molybdenumcompositecoating, bindingforce, wearresistance

CLC Number:

TG174.444

CHENG Wentao， MA Jie， WEI Jianzhong， LI Hongyi， WU Long. Preparation Technology of CVD Molybdenum Composite Coating on Surface of Titanium Alloy[J]. Acta Armamentarii, 2020, 41(11): 2320-2325.

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