Design and Performance Test of a Novel Piezo-scanning Stage

doi:10.3969/j.issn.1000-1093.2018.05.015

Abstract

Abstract: A compact piezo-scanning stage based on a novel compound flexible hinge is designed. A kind of flexible drive hinge with two-stage magnification is proposed for piezo-scanning stage. The motion range of its deflection angle is calculated by analytical calculation and finite element analysis, respectively. The structure and working principle of piezo-scanning stage is presented. The deflection angle range and resonant frequency of the stage prototype are tested. A series of experiments for open loop and closed loop controls are conducted to validate the performance of the stage after its deflection angle is calibrated. Experimental results show that the angle resolution of the stage is 1.5 μrad; better positioning performance can be achieved because the steady-state peak-to-valley error is 4.2 μrad within ±3 μrad of the final steady state value when a staircase step signal is positioned by closed loop control; better control effect of deflection angle can be obtained by closed loop control compared with open loop control in quasi-static operation mode, because the closed-loop positioning error is 1.9% with a significant decline while the open loop error is 25.0% of the whole range when 1 Hz triangle wave is tracked. Key

Key words: scanningstage, design, test, flexiblemechanism, hysteresisnonlinearity, tracking, control

CLC Number:

TH745.4

WANG Geng， WANG Shuai-qi. Design and Performance Test of a Novel Piezo-scanning Stage[J]. Acta Armamentarii, 2018, 39(5): 952-960.

References

［1］ Beerer M J, Yoon H, Agrawal B N. Practical adaptive filter controls for precision beam pointing and tracking with jitter attenuation[J]. Control Engineering Practice, 2013, 21 (1): 122-133.
[2］马佳光，唐涛. 复合轴精密跟踪技术的应用与发展[J]. 红外与激光工程, 2013, 42(1): 218-227.
MA Jia-guang, TANG Tao. Application and development of precision tracking technology of composite shaft[J]. Infrared and Laser Engineering, 2013, 42(1):218-227.(in Chinese)
[3］ Tian J, Yang W, Peng Z, et al. Inertial sensor-based multiloop control of fast steering mirror for line of sight stabilization[J]. Optical Engineering, 2016, 55(11):111602.
[4］ Chen W, Chen S H, Luo D, et al. A compact two-dimensional laser scanner based on piezoelectric actuators[J]. Review of Scientific Instruments, 2015, 86(1): 013102.
[5］宋盛, 刘重飞, 苑自勇,等. 压电驱动双面快速指向镜的设计[J]. 光学精密工程, 2016, 24(11):2777-2782.
SONG Sheng, LIU Chong-fei, YUAN Zi-yong, et al. Design of double-sided fast steering mirror based on piezoelectric actuating[J]. Optics and Precision Engineering, 2016, 24(11): 2777-2782. (in Chinese)
[6］ Jing Z J, Xu M L, Feng B. Modeling and optimization of a novel two-axis mirror-scanning mechanism driven by piezoelectric actuators[J]. Smart Materials and Structures, 2015, 24(2): 025002.
[7］ Liu L, Bai Y G, Zhang D L, et al. Ultra-precision measurement and control of angle motion in piezo-based platforms using strain gauge sensors and a robust composite controller[J]. Sensors, 2013, 13(7):9070-9084.
[8］ Yuan G, Wang D H, Li S D. Single piezoelectric ceramic stack actuator based fast steering mirror with fixed rotation axis and large excursion angle[J]. Sensors and Actuators A：Physical, 2015, 235:292-299.
[9］田福庆, 李克玉, 王珏,等. 压电驱动快速反射镜的自适应反演滑模控制[J]. 强激光与粒子束, 2014, 26(1):59-63.
TIAN Fu-qing, LI Ke-yu, WANG Jue, et al. Adaptive backstepping sliding mode control of fast steering mirror driven by piezoelectric actuator[J]. High Power Laser and Particle Beams, 2014, 26(1): 59-63. (in Chinese)

[10］凡木文, 黄林海, 李梅,等. 抑制光束抖动的压电倾斜镜高带宽控制[J]. 物理学报, 2016, 65(2):154-161.
FAN Mu-wen, HUANG Lin-hai, LI Mei, et al. High-bandwidth control of piezoelectric steering mirror for suppression of laser beam jitter[J]. Acta Physica Sinica, 2016, 65(2):154-161. (in Chinese)
[11］ Wang X, Pommier-Budinger V, Reysset A, et al. Simultaneous compensation of hysteresis and creep in a single piezoelectric actuator by open-loop control for quasi-static space active optics applications[J]. Control Engineering Practice, 2014, 33:48-62.
[12］ Wang G, Rao C H. Adaptive control of piezoelectric fast steering mirror for high precision tracking application[J]. Smart Materials and Structures, 2015, 24(3): 035019.
[13］ Xiang S H, Chen S H, Wu X, et al. Study on fast linear scanning for a new laser scanner[J]. Optics and Laser Technology, 2010, 42(1):42-46.
[14］徐新行, 杨洪波, 王兵，等. 快速反射镜关键技术研究[J]. 激光与红外, 2013, 43(10): 1095-1103.
XU Xin-xing, YANG Hong-bo, WANG Bing，et al. Research on the key technology of fast steering mirror[J]. Laser and Infrared, 2013, 43(10): 1095-1103.(in Chinese)
[15］ Liang Q K, Zhang D, Chi Z Z, et al. Six-DOF micro-manipulator based on compliant parallel mechanism with integrated force sensor[J]. Robotics and Computer-Integrated Manufacturing, 2011, 27(1):124-134.
[16］ Xu Q. Design of a large-range compliant rotary micropositioning stage with angle and torque sensing[J]. IEEE Sensors Journal, 2015, 15(4):2419-2430.
[17］ Wang P Y, Xu Q S. Design of a flexure-based constant-force XY precision positioning stage[J]. Mechanism and Machine Theory, 2017, 108:1-13.
[18］王耿, 官春林, 张小军,等. 应变式微型精密压电驱动器的一体化设计及其PID控制[J]. 光学精密工程, 2013, 21(3):709-716.
WANG Geng, GUAN Chun-lin, ZHANG Xiao-jun, et al. Integrated design and PID control of micro precision piezoelectric actuator[J]. Optics and Precision Engineering, 2013, 21(3):709-716. (in Chinese)
[19］ Xu Q S. A novel compliant micropositioning stage with dual ranges and resolutions[J]. Sensors and Actuators A: Physical, 2014, 205:6-14.

第39卷
第5期2018 年5月兵工学报ACTA
ARMAMENTARIIVol.39No.5May2018

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