Abstract: A kind of high-g capacitive micro-machined accelerometer with comb structure is proposed for the special demand of high-g acceleration test. It is an in-plane sensitive accelerometer with area-variable differential capacitance. The natural frequency, transverse effect, measuring range and acceleration sensitivity of sensor are designed and analyzed. Simulation results show that, the measuring range of the designed accelerometer is 200 000 g with the acceleration resolution of better than 60 g in 0-10 kHz bandwidth; its natural frequency is 266.2 kHz , and the modal separation ratio is more than 2.5. It is fabricated by silicon-on-glass MEMS technology. The test and the primary shock experiment of sensor are performed. Compared with the existing high-g micro-machined accelerometers, the designed accelerometer has good linearity, small transverse effect, high acceleration sensitivity and strong ability to resist high overload.

Key words: electronic technology, high-g accelerometer, capacitive micro-machined accelerometer, micro-electro-mechanical system, simulation design