Simulation Design of a High Q Tunable Capacitor with Comb Structure

doi:10.3969/j.issn.1000-1093.2013.10.007

Acta Armamentarii ›› 2013, Vol. 34 ›› Issue (10): 1236-1242.doi: 10.3969/j.issn.1000-1093.2013.10.007

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Simulation Design of a High Q Tunable Capacitor with Comb Structure

LI Yan-ning^1,2, RUAN Yong¹, YOU Zheng¹, XU Hong-wei², LI Yu-gang²

1. Department of Precision Instruments, Tsinghua University, Beijing 100084,China; 2. Xi'an Institute of Modern Control Technology, Xi'an 710065, Shaanxi, China

Received:2012-08-27 Revised:2012-08-27 Online:2013-12-16
Contact: LI Yan-ning E-mail:lynx3333@163. com

Abstract

Abstract: A design scheme of micro-electro-mechanical system (MEMS) tunable capacitor with comb structure is proposed. Simulation design was implemented in terms of structure, electrical properties and process. FEM simulation indicates that, for the tunable capacitor, the capacitance tuning ratio is 3. 45：1, the tuning range is 88. 16 ~392. 19 fF at 67 V drive voltage, the resonant frequency is 36 GHz, Q fac- tor is 223 (1 GHz), and the reflection attenuation is 0. 002 25 dB, insertion loss is 42. 75 dB, respec- tively. Compared with other tunable capacitors, the design has high Q, high adjustable capacitance rate and simple process.

Key words: electronics technology, tunable capacitor, micro-electro-mechanical system, simulation de- sign, serpentine spring, Q factor

CLC Number:

LI Yan-ning, RUAN Yong, YOU Zheng, XU Hong-wei, LI Yu-gang. Simulation Design of a High Q Tunable Capacitor with Comb Structure[J]. Acta Armamentarii, 2013, 34(10): 1236-1242.

References

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Simulation Design of a High Q Tunable Capacitor with Comb Structure

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