CMOS-compatible High-Q Micro-electro-mechanical System Suspended on-chip Spiral Inductor

doi:10.3969/j.issn.1000-1093.2014.05.009

Abstract

Abstract: A COMS-compatible high Q-factor suspended on-chip spiral inductor used in the radio frequency front-end of radio fuze is designed and fabricated using the micro-electro-mechanical system (MEMS) surface-micromachining technology. The fabrication process of inductor is compatible with CMOS in the aspects of both thermal budget and materials. The loss factors of on-chip spiral inductor are reduced by using a suspended copper coil, and the Q-factor is significantly improved. The improved inductor model is analyzed by the electromagnetic finite element analysis software HFSS. The MEMS suspended on-chip inductor is measured. The measurement results show that the Q-factor of inductor is more than 20 in the frequency range of 1～7.6 GHz and reaches 38 at 7.4 GHz.

Key words: ordnance science and technology, micro-electro-mechanical system, COMS-compatible process, suspended on-chip spiral inductor, Q-factor, radio fuze

CLC Number:

TN40
TN405

LU Chong-ying， XU Li-xin， LI Jian-hua， FU Bo， OU Xiu-long. CMOS-compatible High-Q Micro-electro-mechanical System Suspended on-chip Spiral Inductor[J]. Acta Armamentarii, 2014, 35(5): 634-639.

References

［1］崔占忠．引信发展若干问题[J]．探测与控制学报，2008，30(2)： 1-4．
CUI Zhan-zhong．Some issues on the fuze development[J]．Journal of Detection & Control，2008，30(2)：1-4．（in Chinese）
[2］ Yue C P, Wong S S. On-chip spiral inductors with patterned ground shields for Si-based RF ICs[J]. IEEE Journal of Solid-State Circuits, 1998, 33(5): 743-752.
[3］ Lin Y S，Chen C Z，Liang H B，et al．High performance on-chip transformers with partial polysilicon patterned ground shields(PGS)[J]．IEEE Transactions on Electron Devices．2007，54(1)： 157-160．

[4］ Xu X M，Li P L，Cai M，et al．Design of novel high-Q-factor multipath stacked on-chip spiral inductors[J]．IEEE Transactions on Electron Devices，2012，59(8)：2011-2018．
[5］王建卫，蔡坚，窦新玉，等．陶瓷基板上的集成微电感模型与制作[J]．半导体技术，2009，34(11)：1074-1077．
WANG Jian-wei，CAI Jian，DOU Xin-yu，et al．Model and fabrication of integrated micro-inductors based on ceramic substrate[J]．Semiconductor Technology，2009，34(11)：1074-1077. (in Chinese)
[6］赵小林，王西宁，周勇，等．双层悬空结构射频微电感制作研究[J]．微纳电子技术，2005(1)：30-32．
ZHAO Xiao-lin，WANG Xi-ning，ZHOU Yong，et al．Fabrication and performance of double layer suspended spiral inductor[J]．Micronanoelectronic Technology，2005(1)：30-32. (in Chinese)
[7］ Raieszadeh M，Monajemi P，Yoon S W，et al．High-Q integrated inductors on trenched silicon island[C]∥Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems. Atlanta：IEEE，2005：199-202．
[8］ Ozrur M，Zaghloul M E，Gaitan M．Optimization of backside micromachined CMOS inductors for RF applications[C]∥IEEE International Symposium on Circuits and Systems. Geneva：IEEE，2000：V185-V188．
[9］ Lin J W，Chen C C，Cheng Y T，et al．A robust high-Q micromachined RF inductor for RFIC applications[J]．IEEE Transactions on Electron Devices，2005，52(7)：1489-1496．
[10］ Yoon J B，Choi Y S，Kim B I，et al．CMOS-compatible surface-micromachined suspended-spiral inductors for multi-GHz silicon RF ICs[J]．IEEE Electron Devices Letters，2002，23(10)：591-593．
[11］ Yue C P，Wong S S．Physical modeling of spiral inductors on silicon[J]．IEEE Transactions on Electron Devices，2000，47(3)：560-568．
[12］ Faraji-Deza R，Chow Y L．The current distribution and AC resistance of a microstrip structure[J]．IEEE Transactions on Microwave Theory and Techniques，1990，38(9)：1268-1277．
[13］ Tai C M，Liao C N．Multilevel suspended thin-film inductors on silicon wafers[J]．IEEE Transactions on Electron Devices，2007，54(6)：1510-1514．
［14］ NIE Wei-rong, XI Zhan-wen, XUE Wei-qing, et al. Study on inertial response performance of a micro electrical switch for fuze［J］. Defence Technology, 2013, 9(4): 187-192.

[1]	LIU Bing, HAO Xinhong, ZHOU Wen, YANG Jin. Recognition Method of Target and Sweep Jamming Signal for FM Radio Fuze Based on BAS-BPNN [J]. Acta Armamentarii, 2023, 44(8): 2391-2403.
[2]	DONG Erwa, HAO Xinhong, YAN Xiaopeng, YU Honghai. Research on Interference Mechanism of Swept-frequency Jamming to UWB Radio Fuze [J]. Acta Armamentarii, 2023, 44(4): 1006-1014.
[3]	CHEN Kaibai, GAO Min, ZHOU Xiaodong, BI Junjian, WANG Yi. A Method for Calculating the Shielding Effectiveness of Radio Fuze Cavity [J]. Acta Armamentarii, 2023, 44(4): 1200-1208.
[4]	MAO Ming, WANG Jian-bing. Research on Influence of Breakwater on Hydrodynamic Characterisitics of Displacement Amphibious Vehicles [J]. Acta Armamentarii, 2016, 37(9): 1553-1560.
[5]	GAO Jun-qiang, TANG Xia-qing, HUANG Xiang-yuan, CHENG Xu-wei. FEA Method for Analysis of SINS Error Caused by Vibration Isolation System [J]. Acta Armamentarii, 2016, 37(9): 1570-1577.
[6]	NI Yan-jie， CHENG Nian-kai, JIN Yong， YANG Chun-xia， LI Hai-yuan， LI Bao-ming. Numerical Simulation on Pressure Wave in a 30mm Electrothermal-chemical Gun [J]. Acta Armamentarii, 2016, 37(9): 1578-1584.
[7]	LU Ye, ZHOU Ke-dong, HE Lei, LI Jun-song, HUANG Xue-ying. Research on Influence of Muzzle Brake Efficiency on a New Large Caliber Machine Gun Based on Floating Principle [J]. Acta Armamentarii, 2016, 37(9): 1585-1591.
[8]	LIU Guo-qing， XU Cheng. The Study of Bullet-Barrel Matching Design Method of High Precision Sniper Rifle [J]. Acta Armamentarii, 2016, 37(9): 1592-1598.
[9]	LI Zhen-xiao， ZHANG Ya-zhou， NI Yan-Jie， LI Bao-ming. Analysis on the Influence of Turn-off Characteristics of Thyristor on Augmented Railgun [J]. Acta Armamentarii, 2016, 37(9): 1599-1605.
[10]	HU Ming, WANG Jiong, WU Xiao-lang. Estimation Method for Storage Life of Magnetorheological Fluid Fuze Arming Device [J]. Acta Armamentarii, 2016, 37(9): 1606-1611.
[11]	ZHOU Peng， CAO Cong-yong， DONG Hao. Analysis of Interior Ballistic Characteristics and Muzzle Flow Field of High-pressure Gas Launcher [J]. Acta Armamentarii, 2016, 37(9): 1612-1616.
[12]	ZHAO Xue-wei， YU Yong-gang， MANG Shan-shan. Influence of Injection Pressure Change on Expansion Characteristics of Pulsed Plasma Jet [J]. Acta Armamentarii, 2016, 37(9): 1617-1623.
[13]	LIN Xiang-yang, LI Han, ZHENG Wen-fang, PAN Ren-ming. Formation Mechanism of Pore Structure of Ball Propellant with Micro-pores Made by Double Emulsion Method [J]. Acta Armamentarii, 2016, 37(9): 1633-1638.
[14]	CUI Yun-xiao, CHEN Peng-wan, David A. Cendón, DAI Kai-da, ZHONG Fang-ping. Numerical Simulation of Dynamic Brazilian Test of Polymer Bonded Explosive Simulant Based on Cohesive Crack Model [J]. Acta Armamentarii, 2016, 37(9): 1639-1645.
[15]	CAO Hao-zhe， WU Yan-xuan， ZHOU Feng， WANG Zheng-jie. Research on Containment Control of Second-order Nonlinear Multi-agent with Collision Avoidance Mechanism [J]. Acta Armamentarii, 2016, 37(9): 1646-1654.