Two-dimensional Small Displacement Measurement Method Based on Capacitive Grating Sensor

doi:10.3969/j.issn.1000-1093.2020.07.023

Abstract

Abstract: A two-dimensional small-displacement measurement method based on capacitive grating sensor and a binary parameter model of displacement in any direction on a plane are proposed, and a dual-channel test system with capacitive grating sensor for small displacement is designed for the difficult discrimination of direction of small displacement of object.The small displacement (mm) of simulated object on the plane is measured on a simulation test bench with 2 micrometers. The two channels of the test system output the differential voltages corresponding to the change in small displacement. The magnitude and direction of small displacement can be obtained by analyzing the differential voltage outputs of two channels. The feasibility of the test method and the correctness of the parameter model were verified through experiment. The experimental results show that the direction and magnitude of displacement can be clearly determined according to the change in the differential voltage outputs of two channels when an object produces a relative displacement in one direction on x-axis or y-axis of the plane coordinate; and the direction and magnitude of displacement can be determined from the computed results of the parameter model by the analyzing the change in the differential voltage outputs of two channels when an object produces a relative displacement at any location on the plane. Key

Key words: capacitancegratingsensor, planesmalldisplacement, two-dimensionalmeasurement, edgeeffect

CLC Number:

TP206⁺.1

WANG Rui， LI Xin'e， MA Tiehua， DU Hongmian， LU Yangyang. Two-dimensional Small Displacement Measurement Method Based on Capacitive Grating Sensor[J]. Acta Armamentarii, 2020, 41(7): 1441-1448.

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第41卷第7期2020 年7月
兵工学报ACTA ARMAMENTARII
Vol.41No.7Jul.2020