钛合金表面化学气相沉积钼复合涂层制备工艺

doi:10.3969/j.issn.1000-1093.2020.11.020

摘要/Abstract

摘要： 在钛基体表面制备结合良好的钼涂层，提高钛合金耐蚀、耐磨性能，为进一步制备二硫化钼、二硅化钼涂层提供基础。采用磁控溅射、化学气相沉积(CVD)等方法在钛上制备出钼复合涂层；测试分析磁控溅射、CVD等方法制备钼复合涂层与钛基体的结合力；对钼复合涂层的结构、成分、组织形貌、硬度、耐磨性等进行分析。研究结果表明：钛基体上磁控溅射铜后CVD钨进而CVD钼，复合涂层临界载荷提升至168.5 N，表面硬度提升至649.3 HV，磨损率从0.035%降到0.007 3%；在钛合金表面利用磁控溅射铜与CVD钨相结合的方式制备的铜/钨复合过渡层可有效防止沉积钼过程中钛基体表面发生氢脆和侵蚀，使钼涂层与钛基体的结合力显著提高，钛基表面硬度和耐磨性明显增强。

关键词: 钛合金, 化学气相沉积, 钼复合涂层, 结合力, 耐磨性

Abstract: A well-bonded molybdenum coating is prepared on the surface of titanium matrix, and the corrosion resistance and wear resistance of titanium alloy are improved to provide a basis for further preparation of MoS₂ and MoSi₂ coating. Magnetron sputtering and chemical vapor deposition (CVD) methods are used to prepare the molybdenum composite coating on the titanium matrix. The bonding force between molybdenum composite coating and titanium matrixe prepared by magnetron sputtering and CVD was tested and analyzed. The binding force between molybdenum composite coatings prepared by different methods and the titanium matrix was test and analyzed. The structure, composition, microstructure, hardness and wear resistance of molybdenum composite coating were analyzed. Results show that tungsten and molybdenum are deposited by CVD after magnetron sputtering of Cu on the titanium matrix, the critical load of composite coating increased to 168.5 N, the surface hardness increased to 649.3 HV, and the wear rate reduced from 0.035% to 0.007 3%. The Cu/W composite transition layer prepared by combining magnetron sputtering Cu and CVD W on the titanium surface can effectively prevent hydrogen embrittlement and corrosion on the surface of titanium matrix, the binding force between the molybdenum coating and the titanium matrix is significantly improved. The hardness and wear resistance of titanium matrix surface are significantly enhanced.

Key words: titaniumalloy, chemicalvapordeposition, molybdenumcompositecoating, bindingforce, wearresistance

中图分类号:

TG174.444

程文涛，马捷，魏建忠，李洪义，吴龙. 钛合金表面化学气相沉积钼复合涂层制备工艺[J]. 兵工学报, 2020, 41(11): 2320-2325.

CHENG Wentao， MA Jie， WEI Jianzhong， LI Hongyi， WU Long. Preparation Technology of CVD Molybdenum Composite Coating on Surface of Titanium Alloy[J]. Acta Armamentarii, 2020, 41(11): 2320-2325.

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