基于容栅传感器的二维微小位移测量方法研究

doi:10.3969/j.issn.1000-1093.2020.07.023

兵工学报 ›› 2020, Vol. 41 ›› Issue (7): 1441-1448.doi: 10.3969/j.issn.1000-1093.2020.07.023

基于容栅传感器的二维微小位移测量方法研究

王睿，李新娥，马铁华，杜红棉，陆阳洋

(中北大学仪器科学与动态测试教育部重点实验室，山西太原 030051)

收稿日期:2019-08-09 修回日期:2019-08-09 上线日期:2020-09-23
通讯作者: 李新娥(1971—), 女, 教授, 硕士生导师 E-mail:zn1lxe@163.com
作者简介:王睿(1994—), 男, 硕士研究生。 E-mail: 2369668533@qq.com
基金资助:
装备预研国防科技重点实验室基金一般项目(61420010402001)

Two-dimensional Small Displacement Measurement Method Based on Capacitive Grating Sensor

WANG Rui， LI Xin'e， MA Tiehua， DU Hongmian， LU Yangyang

(Key Laboratory of Instrumentation Scienceand Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Shanxi, China)

Received:2019-08-09 Revised:2019-08-09 Online:2020-09-23

摘要/Abstract

摘要： 针对物体微小位移方向难以判别的问题，提出一种基于容栅传感器的二维微小位移测量方法以及平面内任意方向位移二元参数模型，并设计了容栅传感器和微小位移双通道测试系统。利用带有两个千分尺的模拟测试台，模拟物体在平面内微小位移（毫米级）进行测量，测试系统两个通道输出与微小位移变化对应的差分电压，通过分析两个通道的差分输出电压即可得到微小位移量值和方向。经过实验验证了测试方法的可行性以及参数模型的正确性。实验结果表明：当物体在平面坐标x轴或y轴产生单方向相对位移时，依据两个通道差分电压输出变化可以明确判断位移方向和量值；当物体在平面内任意位置产生相对位移时，基于参数模型求解结果结合两个通道差分电压输出变化量分析可以确定位移方向和量值。

关键词: 容栅传感器, 平面微小位移, 二维测量, 边缘效应

Abstract: A two-dimensional small-displacement measurement method based on capacitive grating sensor and a binary parameter model of displacement in any direction on a plane are proposed, and a dual-channel test system with capacitive grating sensor for small displacement is designed for the difficult discrimination of direction of small displacement of object.The small displacement (mm) of simulated object on the plane is measured on a simulation test bench with 2 micrometers. The two channels of the test system output the differential voltages corresponding to the change in small displacement. The magnitude and direction of small displacement can be obtained by analyzing the differential voltage outputs of two channels. The feasibility of the test method and the correctness of the parameter model were verified through experiment. The experimental results show that the direction and magnitude of displacement can be clearly determined according to the change in the differential voltage outputs of two channels when an object produces a relative displacement in one direction on x-axis or y-axis of the plane coordinate; and the direction and magnitude of displacement can be determined from the computed results of the parameter model by the analyzing the change in the differential voltage outputs of two channels when an object produces a relative displacement at any location on the plane. Key

Key words: capacitancegratingsensor, planesmalldisplacement, two-dimensionalmeasurement, edgeeffect

中图分类号:

TP206⁺.1

王睿，李新娥，马铁华，杜红棉，陆阳洋. 基于容栅传感器的二维微小位移测量方法研究[J]. 兵工学报, 2020, 41(7): 1441-1448.

WANG Rui， LI Xin'e， MA Tiehua， DU Hongmian， LU Yangyang. Two-dimensional Small Displacement Measurement Method Based on Capacitive Grating Sensor[J]. Acta Armamentarii, 2020, 41(7): 1441-1448.

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第41卷第7期2020 年7月
兵工学报ACTA ARMAMENTARII
Vol.41No.7Jul.2020

基于容栅传感器的二维微小位移测量方法研究

Two-dimensional Small Displacement Measurement Method Based on Capacitive Grating Sensor

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