TiW/Ni/Au爆炸箔制备及性能研究

doi:10.12382/bgxb.2023.0238

摘要/Abstract

摘要：

爆炸箔起爆器因其高可靠性、高安全性而在各类战术武器中备受青睐,但其起爆需要较高的输入能量和电压,需配备专门的起爆线路,导致成本高、体积大,在常规武器中应用受限。为顺应爆炸箔起爆器低能化、小型化的发展趋势,获得充电电压在1.5kV以下的爆炸箔起爆器,设计和制备一种采用TiW/Ni/Au复合薄膜的爆炸箔,并对其电爆性能和驱动能力进行了深入研究。研究结果表明:桥区尺寸为0.15mm×0.15mm的TiW/Ni/Au爆炸箔性能最佳,可在0.1μF储能电容、800V充电电压下可靠发生电爆炸,使25μm厚的聚酰亚胺飞片,在直径350μm的加速膛剪切作用下,在0.4μs内加速到3920m/s;与Cu箔相比,800V充电电压下,相同桥区尺寸的TiW/Ni/Au爆炸箔电爆炸能量利用效率从3.11%提高到了12.76%。

关键词: 爆炸箔, 磁控溅射法, 电爆特性测试, 光子多普勒飞片测速

Abstract:

Exploding foil initiator is very popular in all kinds of tactical weapons because of its high reliability and security, but its initiation requires high input energy and voltage, so it needs to be equipped with special initiation circuit, which leads to high cost and large volume. Its application in conventional weapons is limited. In order to comply with the development trend of low energy and miniaturization of exploding foil initiator and obtain and exploding foil initiator with charging voltage below 1.5kV, a kind of exploding foil with TiW/Ni/Au composite film was designed and prepared, and its electric explosion performance and driving ability were studied deeply. The results show that the TiW/Ni/Au exploding foil with bridge size of 0.15mm×0.15mm has the best performance. It can reliably explode when the charging voltage is 800V and the energy storage capacitance is 0.1μF, so that the 25μm-thick polyimide flyer is accelerated to 3920m/s within 0.4μs under the shear action of an accelerated bore with a diameter of 350μm. Compared with Cu foil, the energy utilization efficiency of TiW/Ni/Au exploding foil is increased from 3.11% to 12.76% at 800V charging voltage.

Key words: exploding foil, magnetron sputtering method, electric explosion characteristic test, photon Doppler flyer velocity measurement

中图分类号:

TJ450

李思宇, 董晓芬, 王云鹏, 李帅, 王端, 王庆华. TiW/Ni/Au爆炸箔制备及性能研究[J]. 兵工学报, 2023, 44(12): 3826-3835.

LI Siyu, DONG Xiaofen, WANG Yunpeng, LI Shuai, WANG Duan, WANG Qinghua. Study on Preparation and Properties of TiW/Ni/Au Exploding Foil[J]. Acta Armamentarii, 2023, 44(12): 3826-3835.

图/表 22

图1 TiW/Ni/Au爆炸箔示意图

Fig.1 Schematic diagram of TiW/Ni/Au exploding foil

图2 爆炸箔桥带和桥区示意图

Fig.2 Schematic diagram of exploding foil bridge band and bridge area

图3 爆炸箔的形状与尺寸

Fig.3 Shape and size of exploding foil

表1 TiW/Ni/Au爆炸箔设计参数表

Table 1 Design parameters of TiW/Ni/Au exploding foil

基底	材料	厚度/μm	桥区尺寸/mm
			0.10×0.10
Pyrex7740玻璃	TiW/Ni/Au	0.05/0.3/3.65	0.15×0.15
			0.20×0.20
			0.23×0.23

图4 磁控溅射机

Fig.4 Magnetron sputtering machine

表2 金属靶材规格参数表

Table 2 Specification parameters of metal target material

靶材	规格/mm	纯度/%
TiW合金(质量含量比W∶Ti=9%∶1%)	ϕ100×2	≥99.95
Ni金属	ϕ100×2	≥99.95
Au金属	ϕ100×2	≥99.95

图5 爆炸箔工艺流程图

Fig.5 Process flow diagram of exploding foil

图6 爆炸箔换能元实物图

Fig.6 Physical view of exploding foil transducer element

图7 TiW/Ni/Au爆炸箔SEM图

Fig.7 SEM micrograph of TiW/Ni/Au exploding foil

图8 TiW/Ni/Au爆炸箔AFM图

Fig.8 AFM micrograph of TiW/Ni/Au exploding foil

图9 测试电路示意图

Fig.9 Schematic diagram of test circuit

图10 激发回路电压曲线

Fig.10 Voltage curve of excitation circuit

表3 电安全性试验结果

Table 3 Electrical safety test results

桥区尺寸/mm	充电电压/V	试验结果
0.10×0.10	500	均激发
0.15×0.15	500	均未激发
0.20×0.20	500	均未激发
0.23×0.23	500	均未激发

图11 充电电压800V、桥区尺寸0.23mm TiW/Ni/Au 爆炸箔电压电流曲线

Fig.11 Voltage and current curves of exploding foil with bridge size of 0.23mm at 800V charging voltage

图12 沉积能量对比

Fig.12 Comparison of deposition energies

图13 能量利用率对比

Fig.13 Energy utilization comparison chart

图14 桥区电流密度对比

Fig.14 Comparison of current densities in the bridge area

图15 爆发功率对比

Fig.15 Burst power comparison chart

图16 光子多普勒测速系统仪器实物图

Fig.16 Physical diagram of photonic Doppler velocimetry system

图17 光子多普勒测速系统线路示意图

Fig.17 Schematic diagram of photonic Doppler velocimetry system circuit

表4 测试仪技术性能指标

Table 4 Technical performance indicators of test instrument

技术指标	数值
激光波长/nm	1554
最大输入光功率/mW	≤500
测量点数	2
理论测速范围/(m·s^-1)	0~60000
传光方式	全光纤传输
时间分辨率/ns	<0.2
仪器供电要求	200~240VAC,50/60Hz,功耗小于100W

图18 PDV飞片测速曲线

Fig.18 PDV flyer velocimetry curve

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