精密对称驱动二级微动放大系统设计及性能

doi:10.12382/bgxb.2021.0351

兵工学报 ›› 2022, Vol. 43 ›› Issue (6): 1456-1465.doi: 10.12382/bgxb.2021.0351

• 论文 • 上一篇

精密对称驱动二级微动放大系统设计及性能

杨满芝¹，景钢¹，郭卫¹，张传伟¹，武宏璋²，魏凯洋¹，李林岳¹，吕振阳¹，桂皓晨¹，张晓栋¹

(1.西安科技大学机械工程学院，陕西西安 710054； 2.西安计量技术研究院，陕西西安 710082)

上线日期:2022-03-23
通讯作者: 郭卫(1955—)，男，教授，博士生导师 E-mail:guow@xust.edu.cn
作者简介:杨满芝（1986—），男，副教授，硕士生导师，博士。E-mail: xkdymz@xust.edu.cn；
景钢（1996—），男，硕士研究生。E-mail:jinggang163@163.com
基金资助:
国家自然科学基金项目(51805428)；陕西省自然科学基础研究计划项目（2018JQ5205)；陕西省教育厅专项计划项目（18JK0528）；陕西省碑林区科技计划项目（GX2032）

Design and Performance of Precision Symmetric Two-stage Micro-drive Amplification System

YANG Manzhi¹，JING Gang¹，GUO Wei¹，ZHANG Chuanwei¹，WU Hongzhang²，WEI Kaiyang¹, LI Linyue¹，L Zhenyang¹，GUI Haochen¹，ZHANG Xiaodong¹

(1.College of Mechanical Engineering，Xi'an University of Science and Technology，Xi'an 710054，Shaanxi，China；2.Xi'an Institute of Metrology，Xi'an 710082，Shaanxi，China)

Online:2022-03-23

摘要/Abstract

摘要： 为获得具有较高运动精度、无寄生运动、放大比较大且可调的微动平台，基于直圆型柔性铰链的导向、传动原理及机构杠杆原理，设计出一种对称驱动且放大比可调的二级微动放大机构（设计放大比为1∶5），并提出压电陶瓷致动器驱动微动放大机构的精密二级微动放大系统设计方案；分析微动机构驱动性能的导向原理及附加力平衡原理，并对微动二级放大机构的放大比进行理论计算；采用试验法分析系统微驱动器的驱动性能，并解析出其驱动方程；利用有限元法分析系统的强度、模态及运动性能。分析结果表明：系统的强度及模态性能符合要求，具有较高的运动精度（在运动行程内，理论计算与有限元分析最大绝对误差为6.27 μm、相对误差为8.36%）；所设计的精密对称驱动二级微动放大系统具有运动精度高、安全性强、放大比大且可调等优势。

关键词: 二级微动放大, 微动机构, 柔性铰链, 压电陶瓷致动器

Abstract: In order to obtain a fretting platform with high motion precision，no parasitic motion，large amplification ratio and adjustable，based on the guiding principle，driving principle and mechanism lever principle of straight round flexure hinge，a two-stage amplification mechanism with symmetric driving and adjustable amplification ratio (design amplification ratio is 1∶5) is designed. The design scheme of precision two-stage micro-drive amplification system driven by piezoelectric actuator is proposed.The guiding principle and additional force balance principle of the driving performance of the micro mechanism were analyzed，and the two-stage amplification ratio of the two-stage micro-drive amplification mechanism was calculated theoretically. The driving performance of the system micro actuator is analyzed by experimental method，and its driving equation is analyzed. The strength，modal and motion performance of the system are analyzed by finite element method. The analysis results show that the strength and modal performance of the system meet the requirements，and the system has high motion precision (The maximum absolute error and relative error are 6.27 μm and 8.36% respectively in the motion stroke）.The two-stage micro-drive amplification system with precision symmetric driving designed in this paper has the advantages of high motion precision，excellent safety performance，large amplification ratio and adjustable.

Key words: two-stagemicro-driveamplification, micromechanism, flexurehinges, piezoelectricactuator

中图分类号:

TH112

杨满芝，景钢，郭卫，张传伟，武宏璋，魏凯洋，李林岳，吕振阳，桂皓晨，张晓栋. 精密对称驱动二级微动放大系统设计及性能[J]. 兵工学报, 2022, 43(6): 1456-1465.

YANG Manzhi，JING Gang，GUO Wei，ZHANG Chuanwei，WU Hongzhang，WEI Kaiyang, LI Linyue，L Zhenyang，GUI Haochen，ZHANG Xiaodong. Design and Performance of Precision Symmetric Two-stage Micro-drive Amplification System[J]. Acta Armamentarii, 2022, 43(6): 1456-1465.

参考文献

［1］贾晓辉，张大卫，田延岭.三自由度精密定位工作台工作空间分析及优化[J].兵工学报，2010，31(5):624-630.
JIA X H，ZHANG D W，TIAN Y L. Workspace analysis and optimization of a 3-dof precision positioning table[J]. Acta Armamentarii，2010，31(5):624-630.(in Chinese)
[2］于靖军，毕树生，宗光华.全柔性微位移放大机构的设计技术研究[J].航空学报，2004，25(1):74-78.
YU J J，BI S S，ZONG G H.Study on the design of fully compliant motion amplification mechanisms in actuation systems for micromanipulators[J].Acta Aeronautica et Astronautica Sinica，2004，25(1):74-78.(in Chinese)
[3］陈方鑫，高福天，杜志江，等．基于混合铰链的三维桥式放大机构的建模、分析与试验[J].机械工程学报，2018，54(13):110-116.
CHEN F X，GAO F T，DU Z J，et al. Modeling analysis and experiments of a three-dimensional bridge-type mechanism with combined flexure hinges [J].Journal of Mmechanical Engineering，2018，54(13):110-116. (in Chinese)
[4］杨志刚，刘登云，吴丽萍，等.应用于压电堆泵的微位移放大机构[J].光学精密工程，2007，15(6):884-888.
YANG Z G，LIU D Y，WU L P，et al.Micro-displacement magnifying mechanism used in piezo-stack pump[J].Optics and Precision Engineering，2007，15（6）:884-888. (in Chinese)
[5］ LING M，CAO J，JIANG Z，et al.Modular kinematics and statics modeling for precision positioning stage[J]. Mechanism and Machine Theory，2017，107: 274-282.
[6］ LING M X，CAO J Y，JIANG Z，et al. Theoretical modeling of attenuated displacement amplification for multistage compliant mechanism and its application[J].Sensors and Actuators A: Physical，2016，249:15-22.
[7］ DONG W，CHEN F X，GAO F T，et al. Development and analysis of a bridge-lever-type displacement amplifier based on hybrid flexure hinges[J].Precision Engineering，2018，54: 171-181.
[8］孙媛，金鑫，叶鑫，等.面向中间尺度零件精密装配的微夹持器[J].兵工学报，2014，35(12):2078-2086.
SUN Y，JIN X，YE X，et al. Micro-gripper for precision meso-scale assembly[J]. Acta Armamenrii，2014，35(12):2078-2086. (in Chinese)
[9］张群明.柔性铰链放大机构的研制[J].机床与液压，2003(6):253-255.
ZHANG Q M. The study of flexible hinge amplify structure[J].Machine Tool & Hydraulics，2003(6):253-255.(in Chinese)
[10］ MA H Q，HU D J，ZHANG K.Micro-displacement amplifying mechanism driven by piezoelectric actuator[J].Journal of Southeast University(English Edition)，2004(1):75-79.
[11］ HWANG E J，MINE K S，SONG S H，et al.Optimal design of a flexure-hinge precision stage with a lever[J].Journal of Mechanical Science and Technology，2007，21(4):616-623.
[12］ LIU Y L，XU Q S. Mechanical design，analysis and testing of a large-range compliant microgripper[J].Mechanical Sciences，2016，7(1):119-126
[13］沈剑英，张海军，赵云.压电陶瓷驱动器杠杆式柔性铰链机构放大率计算方法[J].农业机械学报，2013，44(9):267-271.
SHEN J Y，ZHANG H J，ZHAO Y. Calculation method of magnification ratio for lever-type flexure hinge mechanism driven by piezoactuator[J].Transactions of the Chinese Society for Agricultural Machinery，2013，44(9):267-271. (in Chinese)
[14］卢倩，黄卫清，孙梦馨.基于柔度比优化设计杠杆式柔性铰链放大机构[J].光学精密工程，2016，24(1):102-111.
LU Q，HUANG W Q，SUN M X.Optimization design of amplification mechanism for level flexure hinge based on compliance ratio[J］.Optics and Precision Engineering，2016，24(1): 102-111. (in Chinese)
[15］李玉和，李庆祥，陈璐云，等.单轴柔性铰链设计方法研究[J].清华大学学报(自然科学版），2002，42(2)：172-174．
LI Y H，LI Q X，CHEN L Y，et al. Study on design method of one-axis flexure hinge[J].Journal of Tsinghua University，2002，42(2)：172-174.(in Chinese)
[16］杨满芝，黄玉美，任利娟，等.一种单自由度对称驱动导向及转换的微动回转机构[J].机械工程学报，2014，50(23):8-12.
YANG M Z，HUANG Y M，REN L J，et al.A micro rotary mechanism with single dof symmetric driving as well as guiding and transformatio[J].Journal of Mechanical Engineering，2014，50(23):8-12. (in Chinese)
[17］叶鑫，张之敬，王强，等.微动工作台线性化精度评价方法研究[J].兵工学报，2008，29(6):741-745.
YE X，ZHANG Z J，WANG Q，et al. Research on linear accuracy evaluation method of a micromanipulation platform[J].Acta Armamentarii，2008，29(6):741-745.(in Chinese)
[18］ LU S Z, LIU W, ZHU C Y，et al.Precision displacement control of a diamond-shaped amplifying mechanism driven by piezoelectric actuator based on fuzzy fractionalorder PIλDμ controller[J].Current Nanoscience，2019，15(6):596-605.
[19］刘嘉宇，李通通，余张国，等.多臂空间机器人操作大型目标的全身接触柔顺控制研究[J].兵工学报，2019，40(2):395-403.
LIU J Y，LI T T，YU Z G，et al. On whole-body contact compliance control for spatial multi-arm robot manipulating a large target[J].Acta Armamentarii，2019，40(2):395-403. (in Chinese)
[20］王立栋，陈原.绳驱动刚柔混合式波浪运动补偿机构的运动学建模与碰撞干涉检测[J].兵工学报，2020，41(4):737-749.
WANG L D，CHEN Y. Kinematic modeling and collision interference detection of cable-driven rigid-flexible wave motion compensation mechanism[J].Acta Armamentarii，2020，41(4):737-749. (in Chinese)

精密对称驱动二级微动放大系统设计及性能

Design and Performance of Precision Symmetric Two-stage Micro-drive Amplification System

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 1

编辑推荐

Metrics

本文评价