垂直腔面发射半导体激光器腔模位置对器件输出波长的影响研究

doi:10.3969/j.issn.1000-1093.2019.12.012

兵工学报 ›› 2019, Vol. 40 ›› Issue (12): 2482-2487.doi: 10.3969/j.issn.1000-1093.2019.12.012

垂直腔面发射半导体激光器腔模位置对器件输出波长的影响研究

梁静^1,2，贾慧民¹，苏瑞巩²，唐吉龙¹，房丹¹，冯海通²，张宝顺²，魏志鹏¹

(1.长春理工大学理学院高功率半导体激光器国家重点实验室，吉林长春 130022；2.中国科学院苏州纳米技术与纳米仿生研究所，江苏苏州 215123)

收稿日期:2018-12-25 修回日期:2018-12-25 上线日期:2020-02-14
通讯作者: 贾慧民（1986—），男，实验师，硕士生导师 E-mail:huiminjia01@163.com
作者简介:梁静（1992—），女，硕士研究生。 E-mail: jliang2017@sinano.ac.cn
基金资助:
国家重点研发计划项目（2017YFB0402800）；国家自然科学基金项目（61504010、61504022）；吉林省科技厅中青年科技创新领军人才及团队项目（20160519007JH）；吉林省科技厅重大科技招标专项项目（20160203015GX）

Influence of Cavity Mode on Lasing Wavelength of VCSEL

LIANG Jing^1,2, JIA Huimin¹, SU Ruigong², TANG Jilong¹, FANG Dan¹, FENG Haitong², ZHANG Baoshun², WEI Zhipeng¹

(1.State Key Laboratory of High Power Semiconductor Laser, Changchun University of Science and Technology, Changchun 130022, Jilin， China;2.Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, Jiangsu， China)

Received:2018-12-25 Revised:2018-12-25 Online:2020-02-14

摘要/Abstract

摘要： 为得到高温环境下894.6 nm稳定波长激光输出的垂直腔面发射半导体激光器(VCSEL)，设计并制备了腔模位置不同的VCSEL芯片；通过对VCSEL腔模位置、输出波长和温漂系数的测试分析，研究了腔模位置对器件输出波长的影响，发现腔模位置与输出波长具有线性对应关系。设计了腔模位置在890.5 nm的VCSEL外延片结构，经工艺制备得到了85 ℃高温环境下894.6 nm稳定波长激光输出的VCSEL芯片。实验结果表明，通过调控腔模位置可得到目标波长激光输出的VCSEL芯片，该研究为研制其他波段稳定波长激光输出的垂直腔面发射激光器奠定了基础。

关键词: 垂直腔面发射半导体激光器, 腔模位置, 输出波长, 光学厚度, 反射带宽

Abstract: The chips of vertical cavity surface emitting laser (VCSEL) with different positions of cavity mode were designed and prepared for 894.6 nm VCSEL with wavelength-stabilized output in high temperature environment. The influence of cavity mode position on lasing wavelength is studied by testing and analyzing the cavity mode position, output wavelength and temperature drift coefficient of VCSEL. It is found that the lasing wavelength of VCSEL has a linear relation with cavity mode. A structure of VCSEL with cavity mode at 890.5 nm was designed. VCSEL chips which output wavelength is 894.6 nm in 85 ℃ high temperature environment were prepared. The results show that the desired output wavelength of VCSEL chips can be obtained by controlling the position of cavity mode. Key

Key words: verticalcavitysurfaceemittinglaser, cavitymode, lasingwavelength, opticalthickness, reflectionbandwidth

中图分类号:

TN248.4

梁静，贾慧民，苏瑞巩，唐吉龙，房丹，冯海通，张宝顺，魏志鹏. 垂直腔面发射半导体激光器腔模位置对器件输出波长的影响研究[J]. 兵工学报, 2019, 40(12): 2482-2487.

LIANG Jing, JIA Huimin, SU Ruigong, TANG Jilong, FANG Dan, FENG Haitong, ZHANG Baoshun, WEI Zhipeng. Influence of Cavity Mode on Lasing Wavelength of VCSEL[J]. Acta Armamentarii, 2019, 40(12): 2482-2487.

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第40卷第12期
2019 年12月兵工学报ACTA
ARMAMENTARIIVol.40No.12Dec. 2019

垂直腔面发射半导体激光器腔模位置对器件输出波长的影响研究

Influence of Cavity Mode on Lasing Wavelength of VCSEL

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