YANG H J , CHEN Y , XU J H , et al . Chip control analysis in low-frequency vibration-assisted drilling of Ti-6Al-4V titanium alloys [J ] . International Journal of Precision Engineering and Manufacturing , 2020 , 21 ( 4 ): 565 - 584 . DOI: 10.1007/s12541-019-00286-8 http://doi.org/10.1007/s12541-019-00286-8

O’TOOLE L , KANG C W , FANG F Z . Advances in rotary ultrasonic-assisted machining [J ] . Nanomanufacturing and Metrology , 2020 , 3 ( 1 ): 1 - 25 . DOI: 10.1007/s41871-019-00053-3 http://doi.org/10.1007/s41871-019-00053-3

房善想 , 赵慧玲 , 张勤俭 . 超声加工技术的应用现状及其发展趋势 [J ] . 机械工程学报 , 2017 , 53 ( 19 ): 22 - 32 . DOI: 10.3901/JME.2017.19.022 http://doi.org/10.3901/JME.2017.19.022 根据近年来超声加工技术的发展状况，综述了超声加工技术的应用现状及其发展趋势。超声加工技术具有其极强的切削能力、极小的切削抗力、极细微的光整能力以及极高的强化能力。国内外学者对超声振动系统中的超声换能器和变幅杆进行研究，目的在于增加系统的功率与变幅杆的振幅，以及适用于特定的加工环境。超声加工技术以其工艺优势在难加工材料加工、深小孔加工、薄壁件加工、超声表面光整强化、超声焊接和磨粒冲击等加工领域获得越来越广泛的应用，并且其应用涉及半导体工业、高速列车、汽车制造、航空航天、光学元器件、医疗工业等产业领域。随着超声加工技术应用的日益普遍，超声复合加工、微细超声加工、旋转超声加工以及超声骨切削技术也将得到进一步的发展和运用。

FANG S X , ZHAO H L , ZHANG Q J . The application status and development trends of ultrasonic machining technology [J ] . Journal of Mechanical Engineering , 2017 , 53 ( 19 ): 22 - 32 . (in Chinese) DOI: 10.3901/JME.2017.19.022 http://doi.org/10.3901/JME.2017.19.022 Based on the recent development of the ultrasonic machining technology, the application status and development trends of ultrasonic machining technology are summarized. Ultrasonic machining technology has low cutting resistance and strong cutting, finishing and strengthening abilities. Domestic and foreign scholars have conducted research on the ultrasonic transducer and amplitude transformer in the ultrasonic vibration system. Which aims at increasing the power of the system and the amplitude of the amplitude transformer, and be suitable for a particular processing environment. By right of its process advantages, ultrasonic machining technology has been widely used in the machining of difficult-to-cut material, deep hole machining, thin-walled parts machining, ultrasonic surface strengthening, ultrasonic welding and abrasive impact machining. And its application relates to the fields of semiconductor industry, high-speed train, automobile manufacturing, aerospace, optical components, medical industry and other industries. With the increasing application of ultrasonic machining technology, ultrasonic combined machining, micro ultrasonic machining, rotary ultrasonic machining and ultrasonic bony cutting will get further development and application.

姜兴刚 , 梁海彤 , 卢慧敏 , 等 . 钛合金薄壁件超声椭圆振动铣削研究 [J ] . 兵工学报 , 2014 , 35 ( 11 ): 1891 - 1897 . DOI: 10.3969/j.issn.1000-1093.2014.11.022 http://doi.org/10.3969/j.issn.1000-1093.2014.11.022 针对航空领域中钛合金薄壁件在铣削过程中存在切削力大、加工精度低等问题，提出了超声椭圆振动铣削方法进行钛合金薄壁件的加工。超声椭圆振动铣削时，刀尖的特殊运动轨迹使刀尖具有高线速度特性和高频断续切削特性，平均切削力大为降低，从而增强了铣刀的切削能力，提高了切削加工精度。利用自制的超声铣削刀柄系统，对钛合金试件进行铣削实验，结果表明与普通铣削相比，超声椭圆振动铣削的切削力可降低达50%，零件的形位精度得到了显著提高。

JIANG X G , LIANG H T , LU H M , et al . Investigation of ultrasonic elliptical vibration milling of thin-walled titanium alloy parts [J ] . Acta Armamentarii , 2014 , 35 ( 11 ): 1891 - 1897 . (in Chinese)

LI H , LIN B , WAN S M , et al . An experimental investigation on ultrasonic vibration-assisted grinding of SiO 2f /SiO 2 composites [J ] . Materialsand Manufacturing Processes , 2016 , 31 ( 7 ): 887 - 895 .

DAMBATTA Y S , SARHAN A , SAYUTI M , et al . Ultrasonic assisted grinding of advanced materials for biomedical and aerospace applications-a review [J ] . International Journal of Advanced Manufacturing Technology , 2017 , 92 ( 9 ): 3825 - 3858 . DOI: 10.1007/s00170-017-0316-z http://doi.org/10.1007/s00170-017-0316-z http://link.springer.com/10.1007/s00170-017-0316-z http://link.springer.com/10.1007/s00170-017-0316-z

张国华 , 李咚咚 , 李茂伟 , 等 . 超声椭圆振动车削三维形貌形成研究 [J ] . 兵工学报 , 2017 , 38 ( 10 ): 2002 - 2009 . DOI: 10.3969/j.issn.1000-1093.2017.10.017 http://doi.org/10.3969/j.issn.1000-1093.2017.10.017 为研究椭圆振动车削表面三维几何形貌形成规律及影响因素，采用金属切削理论对椭圆振动切削过程和三维切削模型进行了分析。研究结果发现：切削过程中相邻两转之间不同的相位差特征值对最终表面形貌有着重要的影响；通过已有的试验结果表明，相位差特征值分别为0和0.5时所形成的表面形貌截然不同，与理论分析结果相吻合。

ZHANG G H , LI D D , LI M W , et al . Research on formation of 3-D micro-surface in ultrasonic elliptical vibration cutting [J ] . Acta Armamentarii , 2017 , 38 ( 10 ): 2002 - 2009 . (in Chinese)

郑建新 , 刘威成 , 段玉涛 . 7075铝合金二维超声挤压加工表面质量影响因素及其交互作用研究 [J ] . 兵工学报 , 2017 , 38 ( 6 ): 1231 - 1238 . DOI: 10.3969/j.issn.1000-1093.2017.06.024 http://doi.org/10.3969/j.issn.1000-1093.2017.06.024 进行二维超声挤压加工正交试验，研究静压力、挤压速度和进给量等工艺参数及其交互作用对7075铝合金表面质量的影响，并寻求最优工艺参数。通过极差分析和方差分析，确定工艺参数及其交互作用对表面粗糙度和表层硬度的影响主次顺序和影响显著性；基于数据驱动，采用回归分析方法构建表面粗糙度和表层硬度预测模型；基于响应曲面法，分析交互作用对表面粗糙度和表层硬度的影响；利用有约束多目标规划模型，确定最优工艺参数。研究发现：经过二维超声挤压加工后，7075铝合金试件表面粗糙度值明显降低，而表层硬度大幅度提高；表面粗糙度主要取决于挤压速度和进给量的交互作用，而表层硬度主要取决于静压力、挤压速度，以及挤压速度和进给量、静压力和挤压速度的交互作用。基于预测模型获得的表面粗糙度和表层硬度与实测结果基本吻合；基于最小表面粗糙度值和最高表层硬度值目标下的最优工艺参数也与试验结果较为吻合。研究结果表明，工艺参数之间的交互作用对表面质量的影响是不可忽略的，所构建的表面粗糙度模型和表层硬度模型是有效的。

ZHENG J X , LIU W C , DUAN Y T . Interaction effects of processing parameters on surface quality of two-dimensional ultrasonically extruded 7075 aluminum alloy [J ] . Acta Armamentarii , 2017 , 38 ( 6 ): 1231 - 1238 . (in Chinese)

XING Q X , YAO Z Y , ZHANG Q H . Effects of processing parameters on processing performances of ultrasonic vibration-assisted micro-EDM [J ] . The International Journal of Advanced Manufacturing Technology , 2021 , 112 ( 1 ): 71 - 86 . DOI: 10.1007/s00170-020-06357-9 http://doi.org/10.1007/s00170-020-06357-9

SAXENA K K , QIAN J , REYNAERTS D . A review on process capabilities of electrochemical micromachining and its hybrid variants [J ] . International Journal of Machine Tools and Manufacture , 2018 , 127 ( 4 ): 28 - 56 . DOI: 10.1016/j.ijmachtools.2018.01.004 http://doi.org/10.1016/j.ijmachtools.2018.01.004 https://linkinghub.elsevier.com/retrieve/pii/S0890695518300245 https://linkinghub.elsevier.com/retrieve/pii/S0890695518300245

李红英 , 云乃彰 , 朱永伟 . 超声电解复合微细加工硬质合金试验研究 [J ] . 航空制造技术 , 2009 ( 1 ): 78 - 82 .

LI H Y , YUN N Z , ZHU Y W . Experimental investigation of combined ultrasonic and electrochemical micro-machining of cementedcarbide [J ] . Aviation Manufacturing Technology , 2009 ( 1 ): 78 - 82 . (in Chinese)

RUSZAJ A , ZYBURA M , ŻUREK R , et al . Some aspects of the electrochemical machining process supported by electrode ultrasonic vibrations optimization [J ] . Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture , 2003 , 217 ( 10 ): 1365 - 1371 . DOI: 10.1243/095440503322617135 http://doi.org/10.1243/095440503322617135 http://journals.sagepub.com/doi/10.1243/095440503322617135 http://journals.sagepub.com/doi/10.1243/095440503322617135

WANG M H , CHEN X , TONG W J , et al . Influences of gap pressure on machining performance in radial ultrasonic rolling electrochemical micromachining [J ] . The International Journal of Advanced Manufacturing Technology , 2020 , 107 ( 10 ): 157 - 166 . DOI: 10.1007/s00170-020-05012-7 http://doi.org/10.1007/s00170-020-05012-7

TONG W J , HE K L , WANG X D , et al . Mechanism of 6061 aluminum material erosion in USEMM [J ] . The International Journal of Advanced Manufacturing Technology , 2022 , 118 : 895 - 906 . DOI: 10.1007/s00170-021-07914-6 http://doi.org/10.1007/s00170-021-07914-6

王明环 , 王嘉杰 , 童文俊 , 等 . 微凹坑超声电解滚蚀加工间隙多物理场特性及成型规律 [J ] . 兵工学报 , 2020 , 41 ( 4 ): 783 - 791 . DOI: 10.3969/j.issn.1000-1093.2020.04.017 http://doi.org/10.3969/j.issn.1000-1093.2020.04.017 针对径向超声能场滚蚀微细电解加工（RUR-EMM）间隙物理场变化复杂、能观性较差等问题，基于数值模拟方法，对加工中间隙多物理场耦合作用及变化规律进行研究。建立加工间隙内电场、两相流场、温度场、声场等多场耦合理论模型，通过数值仿真分析得出多场耦合相互影响变化规律、多场耦合下凹坑成型规律。研究结果表明：在振动频率20 kHz、振幅10 μm、加工间隙50 μm、工具阴极旋转角速度0.6°/s、电解液电导率7.9 S/m工况下，超声能场激励微细电解加工中，间隙内电解液周期性流入、流出加工区；电流密度随振动周期发生周期性变化；电解液温度随超声激励与电化学反应的综合作用升高；与滚蚀微细电解加工相比，RUR-EMM间隙内温度上升3.63%、电流密度提高1.45倍，间隙脉动流场有效促进了产物排出，RUR-EMM凹坑深度最大增加14.21%；微凹坑加工试验结果验证了理论模型的正确性，仿真与实际加工试验深度误差在17.07%以内。

WANG M H , WANG J J , TONG W J , et al . Multi-physical field in IEG and micro-dimple forming in ultrasonic rolling electrochemical micromachining [J ] . Acta Armamentarii , 2020 , 41 ( 4 ): 783 - 791 . (in Chinese) DOI: 10.3969/j.issn.1000-1093.2020.04.017 http://doi.org/10.3969/j.issn.1000-1093.2020.04.017 For the complex physical change and poor observability of the radial ultrasound rolling eletrochemical micromachining (RUR-EMM) gap physics field, the coupling effect of multi-physical field in machining gap is studied based on the numerical simulation method. A multi-field coupling theory model of electric field, two-phase flow field, temperature field and sound field in machining gap is established. Based on the proposed model, the variation rule of multi-field coupling interaction and the forming rule of micro dimple under multi-field coupling are obtained by numerical simulation method. Results show that the electrolyte in the gap flows into and out of the machining zone with vibration frequency of 20 kHz, amplitude of 10 μm, machining gap of 50 μm, cathode rotating angular velocity of 0.6°/s, and electrode conductivity of 7.9 S/m. The current density periodically changes with vibration cycle, and the temperature of electrolyte increases with the combined action of ultrasonic vibration and electrochemical reaction. Compared with rolling electrochemical micromachining (R-EMM), the gap temperature and current density of RUR-EMM are increased by 3.63% and 1.45 times, respectively, and the dimple depth of RUR-EMM is increased by 14.21%. This is because the pulsating flow field in the gap promotes the discharge of products effectively. The experimental results of micro-dimple machining verify the correctness of the theoretical model. The error between the simulated and experimental machining depths is less than 17.07%. Key

GOEL H , PANDEY P M . Performance evaluation of different variants of jet electrochemical micro-drilling process [J ] . Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture , 2016 , 232 ( 3 ): 451 - 464 . DOI: 10.1177/0954405416646689 http://doi.org/10.1177/0954405416646689 http://journals.sagepub.com/doi/10.1177/0954405416646689 http://journals.sagepub.com/doi/10.1177/0954405416646689 The article describes fabrication of an experimental setup which could be used for electrochemical drilling process to produce micro-holes in a copper workpiece with its different variants, namely, jet electrochemical micro-drilling, air-assisted jet electrochemical micro-drilling, ultrasonic-assisted jet electrochemical micro-drilling, and pulsed direct current–jet electrochemical micro-drilling process. Process parameters like voltage, electrolyte concentration, interelectrode gap, and electrolyte pressure have been selected to find out their effects on the process responses, namely, hole taper and material removal rate in all the above process. Attachments for air assistance and ultrasonic vibration application have been fabricated and incorporated in the setup. The effects of ultrasonic vibrations and the pulsed direct current voltage on the process responses like material removal rate and hole taper have been investigated. The effect of application of ultrasonic vibrations on the electrolyte jet has been studied. The experimental findings of ultrasonic-assisted jet electrochemical micro-drilling were compared with the findings of jet electrochemical micro-drilling. Similarly, the findings of pulsed direct current–jet electrochemical micro-drilling were also compared with the results of pulsed direct current ultrasonic-assisted jet electrochemical micro-drilling experiments. It has been found that the ultrasonic vibrations have significant effect on the two process responses. From the results, it was observed that with the use of ultrasonic vibrations, the material removal rate has increased to significant level and the hole taper has been decreased than in jet electrochemical micro-drilling. Effects of the pulsed direct current voltage supply on jet electrochemical micro-drilling and (ultrasonic-assisted jet electrochemical micro-drilling) were also analyzed. Application of pulsed direct current voltage has improved the material removal rate and reduced the hole taper in jet electrochemical micro-drilling as well as in ultrasonic-assisted jet electrochemical micro-drilling. The experimental results concluded that ultrasonic assistance have generated the holes with greater material removal rate and lower hole taper and with continuous direct current and pulsed direct current voltage.

吴书安 , 祝锡晶 , 王建青 , 等 . 超声空化泡溃灭冲击波作用固壁面的实验研究 [J ] . 科学技术与工程 , 2017 , 8 ( 14 ): 140 - 144 .

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叶林征 , 祝锡晶 , 王建青 . 近壁声空泡溃灭微射流冲击流固耦合模型及蚀坑反演分析 [J ] . 爆炸与冲击 , 2019 , 39 ( 6 ): 23 - 34 .

YE L Z , ZHU X J , WANG J Q . Fluid-solid coupling model of micro-jet impact from acoustic cavitation bubble collapses near a wall and pit inversion analysis [J ] . Explosion and Shock Waves , 2019 , 39 ( 6 ): 23 - 34 . (in Chinese) DOI: 10.1023/A:1022189016932 http://doi.org/10.1023/A:1022189016932 http://link.springer.com/10.1023/A:1022189016932 http://link.springer.com/10.1023/A:1022189016932

TZANAKIS I , ESKIN D G , GEORGOULAS A , et al . Incubation pit analysis and calculation of the hydrodynamic impact pressure from the implosion of an acoustic cavitation bubble [J ] . Ultrasonics Sonochemistry , 2014 , 21 ( 2 ): 866 - 878 . DOI: 10.1016/j.ultsonch.2013.10.003 http://doi.org/10.1016/j.ultsonch.2013.10.003 An experimental study to evaluate cavitation bubble dynamics is conducted. The aim is to predict the magnitude and statistical distribution of hydrodynamic impact pressure generated from the implosion of various individual acoustic cavitation bubbles near to a rigid boundary, considering geometrical features of the pitted area. A steel sample was subjected to cavitation impacts by an ultrasonic transducer with a 5mm diameter probe. The pitted surface was then examined using high-precision 3D optical interferometer techniques. Only the incubation period where surface is plastically deformed without material loss is taken into account. The exposure time was adjusted in the range of 3-60 s to avoid pit overlapping and a special procedure for pit analysis and characterisation was then followed. Moreover, a high-speed camera device was deployed to capture the implosion mechanisms of cavitation bubbles near to the surface. The geometrical characteristics of single incubation pits as well as pit clusters were studied and their deformation patterns were compared. Consequently, a reverse engineering approach was applied in order the hydrodynamic impact pressure from the implosion of an individual cavitation bubble to be determined. The characteristic parameters of the cavitation implosion process such as hydrodynamic impact pressure and liquid micro-jet impact velocity as well as the hydrodynamic severity of the cavitation impacts were quantified. It was found that the length of the hypotenuse of the orthographic projections from the center of the pit, which basically represents the deformed area of the pit, increases with the hydrodynamic impact aggressiveness in a linear rate. Majority of the hydrodynamic impacts were in the range of 0.4-1 GPa while the corresponding micro-jet velocities were found to be in the range of 200-700 m/s. Outcomes of this study, contribute to further understanding the cavitation intensity from the implosion of acoustically generated bubbles and could certainly represent a significant step towards developing more accurate cavitation models.Copyright © 2013 Elsevier B.V. All rights reserved.

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雷经发 , 许孟 , 刘涛 , 等 . 高应变率下6061铝合金力学性能及本构模型研究 [J ] . 兵器材料科学与工程 , 2019 , 42 ( 1 ): 74 - 78 .

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YE L Z , ZHU X J . Analysis of the effect of impact of near-wall acoustic bubble collapse micro-jet on Al 1060 [J ] . Ultrasonics Sonochemistry , 2017 , 36 ( 3 ): 507 - 516 . DOI: 10.1016/j.ultsonch.2016.12.030 http://doi.org/10.1016/j.ultsonch.2016.12.030 https://linkinghub.elsevier.com/retrieve/pii/S1350417716304692 https://linkinghub.elsevier.com/retrieve/pii/S1350417716304692