Metal additive manufacturing is recognized as a crucial technology for the rapid prototyping and precision fabrication of special high-dynamic （high overload and high strain rate） micro-electro-mechanical system （MEMS） components，particularly for heterogeneous and complex components.Selective laser melting （SLM） serves as the technical approach to address the microscopic mechanical defects due to the density variations，the difficulty in controlling surface morphology and other factors during the additive manufacturing process of specialized MEMS components.A comprehensive experimental investigation is conducted to optimize the additive filling and surface morphology of high-dynamic MEMS components，focusing on the internal filling effects and external surface morphology.The orthogonal and single-factor control variable experiments are used to optimize the SLM multi-parameter process and perform the range and variance analyses.The study concludes that the density is primarily governed by the energy input during the formation of melt pool，while the surface roughness is predominantly determined by the dynamic behavior during the solidification of melt pool.The process parameters influencing the density and surface roughness are ranked，and the optimal synergistic process parameters are determined：a laser power of 130W，a scanning speed of 700mm/s，a laser spot diameter of 0.045mm，and a scan spacing of 0.06mm.MEMS components are fabricated and test based on these parameters.The performance testing shows that the density can reach 99.19% is achieved，while the surface roughness is reduced to 5.45μm.Additionally，a tensile strength of 435MPa is recorded.These results meet the requirements for the use of fuze in the high dynamic environments and provide the valuable process parameters for the fabrication of similar thin-walled MEMS components，thereby enhancing the efficiency of design iteration and optimization.