Experimental Research on Collaborative Optimization of Additive Internal Filling and External Surface Morphology of High-dynamic MEMS Components for Fuze

doi:10.12382/bgxb.2025.0707

Abstract

Abstract:

Metal additive manufacturing is recognized as a crucial technology for the rapid prototyping and precision fabrication of special high-dynamic （high overload and high strain rate） micro-electro-mechanical system （MEMS） components，particularly for heterogeneous and complex components.Selective laser melting （SLM） serves as the technical approach to address the microscopic mechanical defects due to the density variations，the difficulty in controlling surface morphology and other factors during the additive manufacturing process of specialized MEMS components.A comprehensive experimental investigation is conducted to optimize the additive filling and surface morphology of high-dynamic MEMS components，focusing on the internal filling effects and external surface morphology.The orthogonal and single-factor control variable experiments are used to optimize the SLM multi-parameter process and perform the range and variance analyses.The study concludes that the density is primarily governed by the energy input during the formation of melt pool，while the surface roughness is predominantly determined by the dynamic behavior during the solidification of melt pool.The process parameters influencing the density and surface roughness are ranked，and the optimal synergistic process parameters are determined：a laser power of 130W，a scanning speed of 700mm/s，a laser spot diameter of 0.045mm，and a scan spacing of 0.06mm.MEMS components are fabricated and test based on these parameters.The performance testing shows that the density can reach 99.19% is achieved，while the surface roughness is reduced to 5.45μm.Additionally，a tensile strength of 435MPa is recorded.These results meet the requirements for the use of fuze in the high dynamic environments and provide the valuable process parameters for the fabrication of similar thin-walled MEMS components，thereby enhancing the efficiency of design iteration and optimization.

Key words: high-dynamic MEMS component, additive manufacturing, selective laser melting, internal filling, surface morphology, multi-parameter optimization

LÜ Sining, CHAI Yichen, FENG Hengzhen, LOU Wenzhong, LI Shiyi, XIAO Chuan, REN Jie. Experimental Research on Collaborative Optimization of Additive Internal Filling and External Surface Morphology of High-dynamic MEMS Components for Fuze[J]. Acta Armamentarii, 2025, 46(S1): 250707-.

Figures/Tables 20

References 25

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序号	参数	参数值
1	设备型号	DLM-280
2	激光模式	IPG光纤激光
3	光路控制方式	动态变焦+振镜
4	保护气体	氮气
5	送粉方式	上送粉+双向铺粉（硅胶刮条）
6	平台加热	预热至200℃
7	最小激光直径	45μm
8	最小层厚	20μm
9	平台成型尺寸	280mm×280mm×300mm
10	大气压	101kPa
11	环境温度	23.3℃
12	环境湿度	53%
13	冷却液	蒸馏水

序号	参数	参数值
1	设备型号	DLM-280
2	激光模式	IPG光纤激光
3	光路控制方式	动态变焦+振镜
4	保护气体	氮气
5	送粉方式	上送粉+双向铺粉（硅胶刮条）
6	平台加热	预热至200℃
7	最小激光直径	45μm
8	最小层厚	20μm
9	平台成型尺寸	280mm×280mm×300mm
10	大气压	101kPa
11	环境温度	23.3℃
12	环境湿度	53%
13	冷却液	蒸馏水

激光功率 P/W	扫描速度V/ （mm·sec^-1）	激光直径D/ mm	扫描间距H/ mm
50	300	0.045	0.04
70	400	0.055	0.05
90	500	0.065	0.06
110	600	0.075	0.07
130	700	0.085	0.08

激光功率 P/W	扫描速度V/ （mm·sec^-1）	激光直径D/ mm	扫描间距H/ mm
50	300	0.045	0.04
70	400	0.055	0.05
90	500	0.065	0.06
110	600	0.075	0.07
130	700	0.085	0.08

编号	激光功率/W	扫描速度/ （mm·sec^-1）	激光直径/ mm	扫描间距/ mm	体能量密度/ （J·mm^-3）	致密度/ %	表面粗糙度/ μm
1	50	300	0.045	0.04	104.17	93.80	9.74
2	50	400	0.055	0.05	62.50	91.14	8.74
3	50	500	0.065	0.06	41.67	89.06	14.33
4	50	600	0.075	0.07	29.76	83.21	12.19
5	50	700	0.085	0.08	22.32	82.18	13.49
6	70	300	0.055	0.06	97.22	94.69	6.74
7	70	400	0.065	0.07	62.50	91.27	5.43
8	70	500	0.075	0.08	43.75	87.74	10.16
9	70	600	0.085	0.04	72.92	84.40	11.81
10	70	700	0.045	0.05	50.00	92.09	12.61
11	90	300	0.065	0.08	93.75	90.42	4.58
12	90	400	0.075	0.04	140.63	90.06	5.77
13	90	500	0.085	0.05	90.00	86.57	9.56
14	90	600	0.045	0.06	62.50	97.78	10.40
15	90	700	0.055	0.07	45.92	94.55	8.33
16	110	300	0.075	0.05	183.33	89.98	5.29
17	110	400	0.085	0.06	114.58	88.83	7.19
18	110	500	0.045	0.07	78.57	98.12	12.03
19	110	600	0.055	0.08	57.29	99.48	7.32
20	110	700	0.065	0.04	98.21	92.73	8.22
21	130	300	0.085	0.07	154.76	93.81	5.99
22	130	400	0.045	0.08	101.56	97.61	5.38
23	130	500	0.055	0.04	162.50	95.32	7.95
24	130	600	0.065	0.05	108.33	96.60	9.09
25	130	700	0.075	0.06	77.38	99.11	10.77