强电磁脉冲对硅微惯性传感器的损伤效应研究
沈杰, 潘绪超, 方中, 何勇, 陈鸿, 张江南, 史云雷
Damage Effect of Strong Electromagnetic Pulse on Micro-silicon Inertial Sensor
SHEN Jie, PAN Xuchao, FANG Zhong, HE Yong, CHEN Hong, ZHANG Jiangnan, SHI Yunlei
兵工学报
.
2020, (6): 1157
-1164
.
DOI: 10.3969/j.issn.1000-1093.2020.06.012