引信高动态MEMS零件增材内填充与外表面形貌协同优化试验

doi:10.12382/bgxb.2025.0707

摘要/Abstract

摘要：

金属增材制造技术已成为快速成型精密制造特种高动态（高过载、高应变率）微机电（Micro Electromechanical System，MEMS）异构复杂零件的重要手段。以选择性激光熔化（Selective Laser Melting，SLM）为技术手段，针对特种MEMS零件在增材制造过程中会出现的致密度差、表面形貌难以控制等微观力学缺陷问题，开展引信高动态MEMS零件增材内填充与外表面形貌协同优化试验研究。以内填充效果和外表面形貌为主要切入点，采用正交试验和单因素控制变量试验方法，开展了两轮SLM多参数工艺的试验制备并进行极差和方差分析，得到了“致密度主要受熔池形成阶段的能量输入控制，而粗糙度更多取决于熔池凝固阶段的动力学行为”的结论，并分析了影响致密度与表面粗糙度的工艺参数排序，得到协同最优工艺参数：激光功率130W，扫描速度700mm/s，扫激光直径0.045mm，扫描间距0.06mm。基于结果参数开展了MEMS零件加工和性能测试，测试得到致密度可以达到99.19%，同时表面粗糙度可以达到5.45μm；抗拉强度达到435MPa。结果满足引信高动态环境使用要求，可为后续同类型薄壁类MEMS零件的加工提供参数依据，提升设计迭代优化效率。

关键词: 高动态MEMS零件, 增材制造, 选区激光熔化, 内填充, 表面形貌, 多参数优化

Abstract:

Metal additive manufacturing is recognized as a crucial technology for the rapid prototyping and precision fabrication of special high-dynamic （high overload and high strain rate） micro-electro-mechanical system （MEMS） components，particularly for heterogeneous and complex components.Selective laser melting （SLM） serves as the technical approach to address the microscopic mechanical defects due to the density variations，the difficulty in controlling surface morphology and other factors during the additive manufacturing process of specialized MEMS components.A comprehensive experimental investigation is conducted to optimize the additive filling and surface morphology of high-dynamic MEMS components，focusing on the internal filling effects and external surface morphology.The orthogonal and single-factor control variable experiments are used to optimize the SLM multi-parameter process and perform the range and variance analyses.The study concludes that the density is primarily governed by the energy input during the formation of melt pool，while the surface roughness is predominantly determined by the dynamic behavior during the solidification of melt pool.The process parameters influencing the density and surface roughness are ranked，and the optimal synergistic process parameters are determined：a laser power of 130W，a scanning speed of 700mm/s，a laser spot diameter of 0.045mm，and a scan spacing of 0.06mm.MEMS components are fabricated and test based on these parameters.The performance testing shows that the density can reach 99.19% is achieved，while the surface roughness is reduced to 5.45μm.Additionally，a tensile strength of 435MPa is recorded.These results meet the requirements for the use of fuze in the high dynamic environments and provide the valuable process parameters for the fabrication of similar thin-walled MEMS components，thereby enhancing the efficiency of design iteration and optimization.

Key words: high-dynamic MEMS component, additive manufacturing, selective laser melting, internal filling, surface morphology, multi-parameter optimization

吕斯宁, 柴怡琛, 冯恒振, 娄文忠, 李诗怡, 肖川, 任杰. 引信高动态MEMS零件增材内填充与外表面形貌协同优化试验[J]. 兵工学报, 2025, 46(S1): 250707-.

LÜ Sining, CHAI Yichen, FENG Hengzhen, LOU Wenzhong, LI Shiyi, XIAO Chuan, REN Jie. Experimental Research on Collaborative Optimization of Additive Internal Filling and External Surface Morphology of High-dynamic MEMS Components for Fuze[J]. Acta Armamentarii, 2025, 46(S1): 250707-.

图/表 20

参考文献 25

[1]	杨庭琪. 现役小口径炮弹触发引信综合性能研究[D]. 太原: 中北大学, 2024.
	YANG T Q. Comprehensive performance study of trigger fuzes for small caliber artillery shells in service[D]. Taiyuan: North University Of China, 2024.
[2]	李叔洋, 牛菁霖, 霍鹏飞, 等. 小口径枪榴弹尾舵滚转角变结构控制方法[J]. 探测与控制学报, 2024, 46(2):27-32.
	LI S Y, NIU J L, et al. Small caliber grenade ammunition tail rudder roll angle variable structure control method[J]. Journal of Detection & Control, 2024, 46(2):27-32. (in Chinese)
[3]	LV S N,FENG, H Z,LOU, W Z, et al. Research on multi scale control simulation and dynamic verification of high dynamic mems parts in additive manufacturing[J]. Defence Technology. 2025, 47:275-291.
[4]	LAI S J, XIA Q, JUNSEOK K, et al. Phase-field based modeling and simulation for selective laser melting techniques in additive manufacturing communications in nonlinear science and numerical simulation[J]. Commun Nonlinear Sci Numer Simulat 2024, 138:108239.
[5]	LIU S J, LEE M, CHOI C, et al. Effect of additive manufacturing of SUS316L using selective laser melting[J]. Journal Of Materials Research and Technology, 2023, 24:9824-9833.
[6]	AFKHAMI S, DABIRI M, ALAVI S H, et al. Fatigue characteristics of steels manufactured by selective laser melting[J]. International Journal of Fatigue. 2019, 122:72-83.
[7]	LI K, JI C, BAI S W, et al. Selective laser melting of magnesium alloys:necessity,formability,performance,optimization and applications[J]. Journal of Materials Science & Technology, 2023, 151:65-93.
[8]	EYOB M S. State-of-the-art of selective laser melting process:a comprehensive review[J]. Journal of anufacturing Systems 2022, 63:250-274.
[9]	WANG Z, XIAO Z Y, TSE Y, et al. Optimization of processing parameters and establishment of a relationship between microstructure and mechanical properties of SLM titanium alloy[J]. Optics & Laser Technology, 2019, 112:159-167.
[10]	胡勇, 杨小康, 康文江, 等. 不同粒径粉末搭配对激光选区熔化IN738合金成形件表面粗糙度及内部缺陷的影响[J]. 激光与光电子学进展, 2021, 58(1):210-218.
	HU Y, YANG X K et al. Effects of combination of powders with different particle sizes on surface roughness and internal defects of IN738 alloy formed by selective laser melting[J]. Laser & Optoelectronics Progress, 2021, 58(1):210-218. (in Chinese)
[11]	SHAHEEN M Y, THORNTON A R, LUDING S, et al. The influence of material and process parameters on powder spreading in additive manufacturing[J]. Powder Technology, 2021, 383:564-583.
[12]	李强, 刘送永, 王庆阳. 选择性激光熔化成形(SLM)增材制造重熔次数对316L构件表面粗糙度及磨损性能的影响[J]. 中国表面工程, 2024, 37(2):170-181. doi: 10.11933/j.issn.1007-9289.20230616001
	LI Q, LIU S Y, WANG Q Y. Effect of number of remelting times on surface quality and wear performance of 316L produced by selective laser melting[J]. China Surface Engineering, 2024, 37(2):170-181. (in Chinese) doi: 10.11933/j.issn.1007-9289.20230616001
[13]	孙小峰, 黄洁, 荣婷, 等. Ti-6Al-4V合金激光选区熔化及热处理性能影响研究[J]. 金属加工(热加工), 2021,(8):1-6.
	SUN X F, HUANG J, RONG T, et al. Effect of laser selective melting and heat treatment on properties of Ti-6Al-4V alloy[J]. Metal Working, 2021(8):1-6. (in Chinese)
[14]	YANG T, LIU T T, LIAO W H, et al. Effect of processing parameters on overhanging surface roughness during laser powder bed fusion of AlSi10Mg[J]. Journal of Manufacturing Processes, 2021, 61:440-453.
[15]	杨立军, 燕珂, 邓亚辉, 等. 激光选区熔化TC4钛合金工艺参数对成形件表面质量的影响[J]. 应用激光, 2022, 42(5):43-50.
	YANG L J, YAN K, DENG Y H, et al. Effect of process parameters on surface quality of TC4 alloy by laser selective melting[J]. Applied Laser, 2022, 42(5):43-50. (in Chinese)
[16]	MANSOURA A, DEHGHAN S, BARKA N, et al. Investigation into the effect of process parameters on density,surface roughness,and mechanical properties of 316L stainless steel fabricated by selective laser melting[J]. The International Journal of Advanced Manufacturing Technology.2024:130:2547-2562.
[17]	时云, 王联凤, 杜洋, 等. AlSi10Mg铝合金选区激光熔化成形缺陷控制和表面质量优化[J]. 应用激光, 2023, 43(3):19-25.
	SHI Y, WANG L F, DU Y, et al. Defect control and surface quality optimization of AlSi10Mg aluminum alloy manufactured by selective laser melting[J]. Applied Laser, 2023, 43(3):19-25.
[18]	吕海卿, 李明川, 马瑞, 等. SLM工艺参数对表面成形质量的影响规律[J]. 焊接学报, 2024, 45(6):20-29.
	LYU H Q, LI M C, MA R, et al. Research on the influence of SLM process parameters on surface forming quality[J]. Transactions of The China Welding Institution. 2024, 45(6):20-29. (in Chinese)
[19]	张冬云, 曹玄扬, 李丛洋. SLM制造金属微小结构件的可行性研究[J]. 电加工与模具, 2016(3):42-46.
	ZHANG D Y, CAO X Y, LI C Y, et al. The feasibility study on manufacturing the metal micro structure by SLM[J]. Electromachining & Mould, 2016(3):42-46. (in Chinese)
[20]	LIU H, CAI G S, XIN Y X. Effect of processing parameters on the quality of overhanging round hole structure in AlSi10Mg selective laser melting[J]. Materials Today Communications, 2023, 37:107464
[21]	竺俊杰, 王优强, 倪陈兵, 等. 激光增材制造钛合金微观组织和力学性能研究进展[J]. 表面技术, 2024, 53(1):15-32.
	ZHU J J, WANG Y Q, NI C B, et al. Research progress on microstructure and mechanical properties of titanium alloy by laser additive manufacturing[J]. Surface Technology, 2024, 53(1):15-32. (in Chinese)
[22]	YAN W T, QIAN Y, MA W X, et al. Modeling and experimental validation of the electron beam selective melting process[J]. Engineering, 2017, 3(5):701-707.
[23]	YUAN W H, CHEN H, CHENG T, et al. Effects of laser scanning speeds on different states of the molten pool during selective laser melting:Simulation and experiment[J]. Materials & Design, 2020, 189:108542.
[24]	杨立军, 燕珂, 邓亚辉, 等. 激光选区熔化TC4钛合金工艺参数对成形件表面质量的影响[J]. 应用激光, 2022, 42(5):43-50.
	YANG L J, YAN K, DENG Y H, et al. Effect of process parameters on surface quality of TC4 alloy by laser selective melting[J]. Applied Laser, 2022, 42(5):43-50. (in Chinese)
[25]	刘畅, 马行驰, 马海彬. 工艺参数对SLM成型316L不锈钢致密度的影响及缺陷表现方式[J]. 热加工工艺, 2021, 50(12):44-49.
	LIU C, MA X C, MA H B. Effect of process parameters on density of 316L stainless steel by slm and defects manifestation methods[J]. Hot Working Technology, 2021, 50(12):44-49. (in Chinese)

序号	参数	参数值
1	设备型号	DLM-280
2	激光模式	IPG光纤激光
3	光路控制方式	动态变焦+振镜
4	保护气体	氮气
5	送粉方式	上送粉+双向铺粉（硅胶刮条）
6	平台加热	预热至200℃
7	最小激光直径	45μm
8	最小层厚	20μm
9	平台成型尺寸	280mm×280mm×300mm
10	大气压	101kPa
11	环境温度	23.3℃
12	环境湿度	53%
13	冷却液	蒸馏水

序号	参数	参数值
1	设备型号	DLM-280
2	激光模式	IPG光纤激光
3	光路控制方式	动态变焦+振镜
4	保护气体	氮气
5	送粉方式	上送粉+双向铺粉（硅胶刮条）
6	平台加热	预热至200℃
7	最小激光直径	45μm
8	最小层厚	20μm
9	平台成型尺寸	280mm×280mm×300mm
10	大气压	101kPa
11	环境温度	23.3℃
12	环境湿度	53%
13	冷却液	蒸馏水

激光功率 P/W	扫描速度V/ （mm·sec^-1）	激光直径D/ mm	扫描间距H/ mm
50	300	0.045	0.04
70	400	0.055	0.05
90	500	0.065	0.06
110	600	0.075	0.07
130	700	0.085	0.08

激光功率 P/W	扫描速度V/ （mm·sec^-1）	激光直径D/ mm	扫描间距H/ mm
50	300	0.045	0.04
70	400	0.055	0.05
90	500	0.065	0.06
110	600	0.075	0.07
130	700	0.085	0.08

编号	激光功率/W	扫描速度/ （mm·sec^-1）	激光直径/ mm	扫描间距/ mm	体能量密度/ （J·mm^-3）	致密度/ %	表面粗糙度/ μm
1	50	300	0.045	0.04	104.17	93.80	9.74
2	50	400	0.055	0.05	62.50	91.14	8.74
3	50	500	0.065	0.06	41.67	89.06	14.33
4	50	600	0.075	0.07	29.76	83.21	12.19
5	50	700	0.085	0.08	22.32	82.18	13.49
6	70	300	0.055	0.06	97.22	94.69	6.74
7	70	400	0.065	0.07	62.50	91.27	5.43
8	70	500	0.075	0.08	43.75	87.74	10.16
9	70	600	0.085	0.04	72.92	84.40	11.81
10	70	700	0.045	0.05	50.00	92.09	12.61
11	90	300	0.065	0.08	93.75	90.42	4.58
12	90	400	0.075	0.04	140.63	90.06	5.77
13	90	500	0.085	0.05	90.00	86.57	9.56
14	90	600	0.045	0.06	62.50	97.78	10.40
15	90	700	0.055	0.07	45.92	94.55	8.33
16	110	300	0.075	0.05	183.33	89.98	5.29
17	110	400	0.085	0.06	114.58	88.83	7.19
18	110	500	0.045	0.07	78.57	98.12	12.03
19	110	600	0.055	0.08	57.29	99.48	7.32
20	110	700	0.065	0.04	98.21	92.73	8.22
21	130	300	0.085	0.07	154.76	93.81	5.99
22	130	400	0.045	0.08	101.56	97.61	5.38
23	130	500	0.055	0.04	162.50	95.32	7.95
24	130	600	0.065	0.05	108.33	96.60	9.09
25	130	700	0.075	0.06	77.38	99.11	10.77